Kotaro Oishi

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Koshi City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus
- Patent number 10,192,758
- Issue date Jan 29, 2019
- Tokyo Electron Limited
- Yosuke Kawabuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 9,865,452
- Issue date Jan 9, 2018
- Tokyo Electron Limited
- Kotaro Oishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate processing method and com...
- Patent number 9,805,957
- Issue date Oct 31, 2017
- Tokyo Electron Limited
- Yosuke Kawabuchi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20180012781
- Publication date Jan 11, 2018
- TOKYO ELECTRON LIMITED
- Yosuke Kawabuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20160300710
- Publication date Oct 13, 2016
- TOKYO ELECTRON LIMITED
- Kotaro Oishi
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND COM...
- Publication number 20140360536
- Publication date Dec 11, 2014
- Yosuke Kawabuchi
- H01 - BASIC ELECTRIC ELEMENTS