Koto Umezawa

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Nirasaki-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Film formation method and apparatus for semiconductor process
- Patent number 8,178,448
- Issue date May 15, 2012
- Tokyo Electron Limited
- Nobutake Nodera
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
FILM FORMATION METHOD AND APPARATUS FOR SEMICONDUCTOR PROCESS
- Publication number 20100304574
- Publication date Dec 2, 2010
- TOKYO ELECTRON LIMITED
- Nobutake NODERA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...