Kotoko Hirose

Person

Matsudo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Scanning charged particle beam device and method for correcting chr...
- Patent number 8,772,732
- Issue date Jul 8, 2014
- Hitachi High-Technologies Corporation
- Tomonori Nakano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus and geometrical aberration measurem...
- Patent number 8,581,190
- Issue date Nov 12, 2013
- Hitachi High-Technologies Corporation
- Tomonori Nakano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus including aberration corrector
- Patent number 8,558,171
- Issue date Oct 15, 2013
- Hitachi High-Technologies Corporation
- Kotoko Hirose
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus of tilted illumination observation
- Patent number 8,436,899
- Issue date May 7, 2013
- Hitachi High-Technologies Corporation
- Takeshi Kawasaki
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle radiation device provided with aberration corrector
- Patent number 8,258,475
- Issue date Sep 4, 2012
- Hitachi High-Technologies Corporation
- Kotoko Hirose
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus including aberration corrector
- Patent number 8,129,680
- Issue date Mar 6, 2012
- Hitachi High-Technologies Corporation
- Kotoko Hirose
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for estimation of probe shape in charged particle beam instr...
- Patent number 7,915,582
- Issue date Mar 29, 2011
- Hitachi High-Technologies Corporation
- Kotoko Hirose
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Aberration corrector and charged particle beam apparatus using the...
- Patent number 7,834,326
- Issue date Nov 16, 2010
- Hitachi High-Technologies Corporation
- Takeshi Kawasaki
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle beam apparatus, aberration correction value calcul...
- Patent number 7,714,286
- Issue date May 11, 2010
- Hitachi High-Technologies Corporation
- Tomonori Nakano
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SCANNING CHARGED PARTICLE BEAM DEVICE AND METHOD FOR CORRECTING CHR...
- Publication number 20120199739
- Publication date Aug 9, 2012
- Hitachi High-Technologies Corporation
- Tomonori Nakano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS INCLUDING ABERRATION CORRECTOR
- Publication number 20120153146
- Publication date Jun 21, 2012
- Hitachi High-Technologies Corporation
- Kotoko HIROSE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE RADIATION DEVICE PROVIDED WITH ABERRATION CORRECTOR
- Publication number 20110272578
- Publication date Nov 10, 2011
- Hitachi High-Technologies Corporation
- Kotoko Hirose
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM INSTRUMENT COMPRISING AN ABERRATION CORRECTOR
- Publication number 20110210248
- Publication date Sep 1, 2011
- Hitachi High-Technologies Corporation
- Kotoko HIROSE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS AND GEOMETRICAL ABERRATION MEASUREM...
- Publication number 20110139980
- Publication date Jun 16, 2011
- Hitachi High-Technologies Corporation
- Tomonori Nakano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR ESTIMATION OF PROBE SHAPE IN CHARGED PARTICLE BEAM INSTR...
- Publication number 20100264309
- Publication date Oct 21, 2010
- Kotoko HIROSE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and Apparatus of Tilted Illumination Observation
- Publication number 20100033560
- Publication date Feb 11, 2010
- Hitachi High-Technologies Corporation
- Takeshi Kawasaki
- G01 - MEASURING TESTING
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS INCLUDING ABERRATION CORRECTOR
- Publication number 20090212228
- Publication date Aug 27, 2009
- Kotoko HIROSE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ABERRATION CORRECTOR AND CHARGED PARTICLE BEAM APPARATUS USING THE...
- Publication number 20090039281
- Publication date Feb 12, 2009
- Takeshi KAWASAKI
- G01 - MEASURING TESTING
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS, ABERRATION CORRECTION VALUE CALCUL...
- Publication number 20090008550
- Publication date Jan 8, 2009
- Tomonori Nakano
- H01 - BASIC ELECTRIC ELEMENTS

Kotoko Hirose

Person

Patents Grantslast 30 patents

Scanning charged particle beam device and method for correcting chr...

Charged particle beam apparatus and geometrical aberration measurem...

Charged particle beam apparatus including aberration corrector

Method and apparatus of tilted illumination observation

Charged particle radiation device provided with aberration corrector

Charged particle beam apparatus including aberration corrector

Method for estimation of probe shape in charged particle beam instr...

Aberration corrector and charged particle beam apparatus using the...

Charged particle beam apparatus, aberration correction value calcul...

Patents Applicationslast 30 patents

SCANNING CHARGED PARTICLE BEAM DEVICE AND METHOD FOR CORRECTING CHR...

CHARGED PARTICLE BEAM APPARATUS INCLUDING ABERRATION CORRECTOR

CHARGED PARTICLE RADIATION DEVICE PROVIDED WITH ABERRATION CORRECTOR

CHARGED PARTICLE BEAM INSTRUMENT COMPRISING AN ABERRATION CORRECTOR

CHARGED PARTICLE BEAM APPARATUS AND GEOMETRICAL ABERRATION MEASUREM...

METHOD FOR ESTIMATION OF PROBE SHAPE IN CHARGED PARTICLE BEAM INSTR...

Method and Apparatus of Tilted Illumination Observation

CHARGED PARTICLE BEAM APPARATUS INCLUDING ABERRATION CORRECTOR

ABERRATION CORRECTOR AND CHARGED PARTICLE BEAM APPARATUS USING THE...

CHARGED PARTICLE BEAM APPARATUS, ABERRATION CORRECTION VALUE CALCUL...