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Tokyo, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Measurement system and method for setting observation conditions of...
Patent number
11,380,518
Issue date
Jul 5, 2022
Hitachi, Ltd.
Takafumi Miwa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device and aberration correction method for c...
Patent number
10,727,024
Issue date
Jul 28, 2020
Hitachi High-Technologies Corporation
Kotoko Urano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Aberration correction method, aberration correction system, and cha...
Patent number
10,446,361
Issue date
Oct 15, 2019
Hitachi High-Technologies Corporation
Zhaohui Cheng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device and arithmetic device
Patent number
9,530,614
Issue date
Dec 27, 2016
Hitachi High-Technologies Corporation
Kotoko Urano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multipole and charged particle radiation apparatus using the same
Patent number
9,343,260
Issue date
May 17, 2016
Hitachi High-Technologies Corporation
Kotoko Urano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Aberration corrector and charged particle beam apparatus using the...
Patent number
9,287,084
Issue date
Mar 15, 2016
Hitachi High-Technologies Corporation
Zhaohui Cheng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multipole measurement apparatus
Patent number
8,987,680
Issue date
Mar 24, 2015
Hitachi High-Technologies Corporation
Tomonori Nakano
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Patents Applications
last 30 patents
Information
Patent Application
Measurement System and Method for Setting Observation Conditions of...
Publication number
20210407763
Publication date
Dec 30, 2021
Hitachi, Ltd
Takafumi MIWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM DEVICE AND ABERRATION CORRECTION METHOD FOR C...
Publication number
20190214222
Publication date
Jul 11, 2019
Hitachi High-Technologies Corporation
Kotoko URANO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ABERRATION CORRECTION METHOD, ABERRATION CORRECTION SYSTEM, AND CHA...
Publication number
20180190469
Publication date
Jul 5, 2018
Hitachi High-Technologies Corporation
Zhaohui CHENG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ABERRATION CORRECTOR AND CHARGED PARTICLE BEAM APPARATUS USING THE...
Publication number
20150248944
Publication date
Sep 3, 2015
Hitachi High-Technologies Corporation
Zhaohui Cheng
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
CHARGED PARTICLE BEAM DEVICE AND ARITHMETIC DEVICE
Publication number
20150060654
Publication date
Mar 5, 2015
Hitachi High-Technolgies Corporation
Kotoko Urano
G01 - MEASURING TESTING
Information
Patent Application
MULTIPOLE MEASUREMENT APPARATUS
Publication number
20140217304
Publication date
Aug 7, 2014
Hitachi High-Technologies Corporation
Tomonori Nakano
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
MULTIPOLE AND CHARGED PARTICLE RADIATION APPARATUS USING THE SAME
Publication number
20130320227
Publication date
Dec 5, 2013
Hitachi High-Technologies Corporation
Kotoko Urano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM DEVICE PROVIDED WITH AUTOMATIC ABERRATION COR...
Publication number
20130068949
Publication date
Mar 21, 2013
Kotoko Urano
H01 - BASIC ELECTRIC ELEMENTS