Koudai Higashi

Person

Nirasaki, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Foreign substance detection device and foreign substance detection...
- Patent number 11,906,414
- Issue date Feb 20, 2024
- Tokyo Electron Limited
- Masato Hayashi
- G01 - MEASURING TESTING
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,879,839
- Issue date Jan 23, 2024
- Tokyo Electron Limited
- Koudai Higashi
- G01 - MEASURING TESTING
Information Patent Grant
Foreign substance detection device and foreign substance detection...
- Patent number 11,402,313
- Issue date Aug 2, 2022
- Tokyo Electron Limited
- Masato Hayashi
- G01 - MEASURING TESTING
Information Patent Grant
Substrate processing apparatus, substrate processing system, and su...
- Patent number 11,340,152
- Issue date May 24, 2022
- Tokyo Electron Limited
- Masato Hayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Foreign substance detection device, foreign substance detection met...
- Patent number 11,048,016
- Issue date Jun 29, 2021
- Tokyo Electron Limited
- Masato Hayashi
- G01 - MEASURING TESTING
Information Patent Grant
Substrate processing apparatus, substrate processing system, and su...
- Patent number 11,002,656
- Issue date May 11, 2021
- Tokyo Electron Limited
- Masato Hayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate heat treatment apparatus, substrate heat treatment method...
- Patent number 10,049,905
- Issue date Aug 14, 2018
- Tokyo Electron Limited
- Koudai Higashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transport apparatus
- Patent number 9,953,853
- Issue date Apr 24, 2018
- Tokyo Electron Limited
- Masato Hayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature measuring apparatus
- Patent number 8,608,378
- Issue date Dec 17, 2013
- Tokyo Electron Limited
- Hisaki Ishida
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240125697
- Publication date Apr 18, 2024
- TOKYO ELECTRON LIMITED
- Koudai Higashi
- G01 - MEASURING TESTING
Information Patent Application
FOREIGN SUBSTANCE DETECTION DEVICE AND FOREIGN SUBSTANCE DETECTION...
- Publication number 20220326133
- Publication date Oct 13, 2022
- TOKYO ELECTRON LIMITED
- Masato Hayashi
- G01 - MEASURING TESTING
Information Patent Application
INFORMATION ACQUISITION SYSTEM AND INFORMATION ACQUISITION METHOD
- Publication number 20220319886
- Publication date Oct 6, 2022
- TOKYO ELECTRON LIMITED
- Junnosuke Maki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INFORMATION ACQUISITION SYSTEM FOR SUBSTRATE PROCESSING APPARATUS,...
- Publication number 20220319893
- Publication date Oct 6, 2022
- TOKYO ELECTRON LIMITED
- Junnosuke MAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20220034802
- Publication date Feb 3, 2022
- TOKYO ELECTRON LIMITED
- Koudai Higashi
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, AND SU...
- Publication number 20210247286
- Publication date Aug 12, 2021
- TOKYO ELECTRON LIMITED
- Masato HAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FOREIGN SUBSTANCE DETECTION DEVICE AND FOREIGN SUBSTANCE DETECTION...
- Publication number 20210190661
- Publication date Jun 24, 2021
- TOKYO ELECTRON LIMITED
- Masato Hayashi
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, AND SU...
- Publication number 20200240891
- Publication date Jul 30, 2020
- TOKYO ELECTRON LIMITED
- Masato HAYASHI
- G01 - MEASURING TESTING
Information Patent Application
FOREIGN SUBSTANCE DETECTION DEVICE, FOREIGN SUBSTANCE DETECTION MET...
- Publication number 20190383963
- Publication date Dec 19, 2019
- TOKYO ELECTRON LIMITED
- Masato Hayashi
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE HEAT TREATMENT APPARATUS, SUBSTRATE HEAT TREATMENT METHOD...
- Publication number 20160093519
- Publication date Mar 31, 2016
- TOKYO ELECTRON LIMITED
- Koudai HIGASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSPORT APPARATUS
- Publication number 20150340258
- Publication date Nov 26, 2015
- Tokyo Electron Limited
- Masato HIYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE MEASURING DEVICE, TEMPERATURE CALIBRATING DEVICE AND TE...
- Publication number 20120275484
- Publication date Nov 1, 2012
- TOKYO ELECTRON LIMITED
- Masato HAYASHI
- G01 - MEASURING TESTING
Information Patent Application
TEMPERATURE MEASURING APPARATUS
- Publication number 20120269229
- Publication date Oct 25, 2012
- TOKYO ELECTRON LIMITED
- Hisaki Ishida
- G01 - MEASURING TESTING
Information Patent Application
WAFER-TYPE TEMPERATURE SENSOR AND MANUFACTURING METHOD THEREOF
- Publication number 20110233546
- Publication date Sep 29, 2011
- TOKYO ELECTRON LIMITED
- Koudai Higashi
- G01 - MEASURING TESTING

Koudai Higashi

Person

Patents Grantslast 30 patents

Foreign substance detection device and foreign substance detection...

Substrate processing apparatus and substrate processing method

Foreign substance detection device and foreign substance detection...

Substrate processing apparatus, substrate processing system, and su...

Foreign substance detection device, foreign substance detection met...

Substrate processing apparatus, substrate processing system, and su...

Substrate heat treatment apparatus, substrate heat treatment method...

Substrate transport apparatus

Temperature measuring apparatus

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

FOREIGN SUBSTANCE DETECTION DEVICE AND FOREIGN SUBSTANCE DETECTION...

INFORMATION ACQUISITION SYSTEM AND INFORMATION ACQUISITION METHOD

INFORMATION ACQUISITION SYSTEM FOR SUBSTRATE PROCESSING APPARATUS,...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, AND SU...

FOREIGN SUBSTANCE DETECTION DEVICE AND FOREIGN SUBSTANCE DETECTION...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, AND SU...

FOREIGN SUBSTANCE DETECTION DEVICE, FOREIGN SUBSTANCE DETECTION MET...

SUBSTRATE HEAT TREATMENT APPARATUS, SUBSTRATE HEAT TREATMENT METHOD...

SUBSTRATE TRANSPORT APPARATUS

TEMPERATURE MEASURING DEVICE, TEMPERATURE CALIBRATING DEVICE AND TE...

TEMPERATURE MEASURING APPARATUS

WAFER-TYPE TEMPERATURE SENSOR AND MANUFACTURING METHOD THEREOF