Kouhei Satou

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Kudamatsu-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Vacuum processing apparatus and operating method of vacuum processi...
- Patent number 11,600,472
- Issue date Mar 7, 2023
- HITACHI HIGH-TECH CORPORATION
- Ryoichi Isomura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum processing apparatus
- Patent number 7,887,669
- Issue date Feb 15, 2011
- Hitachi High-Technologies Corporation
- Kouhei Satou
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
VACUUM PROCESSING APPARATUS AND OPERATING METHOD OF VACUUM PROCESSI...
- Publication number 20190157053
- Publication date May 23, 2019
- Hitachi High-Technologies Corporation
- Ryoichi ISOMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM PROCESSING APPARATUS
- Publication number 20110120649
- Publication date May 26, 2011
- Kouhei Satou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA ETCHING APPARATUS AND PLASMA ETCHING METHOD
- Publication number 20100167426
- Publication date Jul 1, 2010
- Naoyuki Kofuji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA ETCHING APPARATUS AND PLASMA ETCHING METHOD
- Publication number 20090152241
- Publication date Jun 18, 2009
- Go Miya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM PROCESSING APPARATUS
- Publication number 20080110400
- Publication date May 15, 2008
- Kouhei Satou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA ETCHING APPARATUS AND PLASMA ETCHING METHOD
- Publication number 20080110569
- Publication date May 15, 2008
- Go Miya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA ETCHING APPARATUS AND PLASMA ETCHING METHOD
- Publication number 20080078505
- Publication date Apr 3, 2008
- Naoyuki Kofuji
- H01 - BASIC ELECTRIC ELEMENTS