Kouichi Iio

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Amagasaki, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus
- Patent number 5,911,852
- Issue date Jun 15, 1999
- Sumitomo Metal Industries Limited
- Katsuo Katayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus having a protected microwave transmissi...
- Patent number 5,804,923
- Issue date Sep 8, 1998
- Sumitomo Metal Industries Limited
- Kouichi Iio
- H01 - BASIC ELECTRIC ELEMENTS