Kouichi Itou

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Tosu-city, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus, substrate transfer method and stora...
- Patent number 9,484,235
- Issue date Nov 1, 2016
- Tokyo Electron Limited
- Kouichi Itou
- G05 - CONTROLLING REGULATING
Information Patent Grant
Substrate processing apparatus, substrate processing method and sto...
- Patent number 8,644,981
- Issue date Feb 4, 2014
- Tokyo Electron Limited
- Kouichi Itou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate transfer method
- Patent number 8,630,733
- Issue date Jan 14, 2014
- Tokyo Electron Limited
- Kouichi Itou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and method
- Patent number 6,945,258
- Issue date Sep 20, 2005
- Tokyo Electron Limited
- Kouichi Itou
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE TRANSFER METHOD AND STORA...
- Publication number 20140093984
- Publication date Apr 3, 2014
- TOKYO ELECTRON LIMITED
- Kouichi Itou
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
Substrate Processing Apparatus, Substrate Processing Method and Sto...
- Publication number 20120065770
- Publication date Mar 15, 2012
- TOKYO ELECTRON LIMITED
- Kouichi Itou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE TRANSFER METHOD
- Publication number 20110076120
- Publication date Mar 31, 2011
- TOKYO ELECTRON LIMITED
- Kouichi Itou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus and method
- Publication number 20020153027
- Publication date Oct 24, 2002
- Kouichi Itou
- H01 - BASIC ELECTRIC ELEMENTS