Kouichi Kazama

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Patents Grantslast 30 patents

Information Patent Grant
Electrostatic chuck
- Patent number 5,625,526
- Issue date Apr 29, 1997
- Tokyo Electron Limited
- Masahide Watanabe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of controlling temperature of susceptor
- Patent number 5,567,267
- Issue date Oct 22, 1996
- Tokyo Electron Limited
- Kouichi Kazama
- H01 - BASIC ELECTRIC ELEMENTS