Kouichi NAKAJIMA

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Yamanashi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and charge neutralization method for...
- Patent number 11,862,439
- Issue date Jan 2, 2024
- Tokyo Electron Limited
- Takahiro Kawawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing system, substrate processing method, and contr...
- Patent number 11,086,286
- Issue date Aug 10, 2021
- Tokyo Electron Limited
- Toshiharu Hirata
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND CHARGE NEUTRALIZATION METHOD FOR...
- Publication number 20200312636
- Publication date Oct 1, 2020
- TOKYO ELECTRON LIMITED
- Takahiro KAWAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING METHOD, AND CONTR...
- Publication number 20200012254
- Publication date Jan 9, 2020
- TOKYO ELECTRON LIMITED
- Toshiharu HIRATA
- G05 - CONTROLLING REGULATING