Kouichi Nakaune

Follow

Person

Kudamatsu-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
LSI device etching method and apparatus thereof
- Patent number 6,919,274
- Issue date Jul 19, 2005
- Hitachi High-Technologies Corporation
- Hideyuki Kazumi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
LSI device etching method and apparatus thereof
- Publication number 20050026431
- Publication date Feb 3, 2005
- Hitachi High-Technologies Corporation
- Hideyuki Kazumi
- H01 - BASIC ELECTRIC ELEMENTS