Kouichi Noto

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Semiconductor device producing apparatus and producing method of se...
- Patent number 7,198,447
- Issue date Apr 3, 2007
- Hitachi Kokusai Electric Inc.
- Kazuhiro Morimitsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for processing substrates and method for manuf...
- Patent number 6,927,165
- Issue date Aug 9, 2005
- Hitachi Kokusai Electric, Inc.
- Tatsuhisa Matsunaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method and apparatus
- Patent number 6,658,321
- Issue date Dec 2, 2003
- Hitachi Kokusai Electric Inc.
- Akihiro Osaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for processing substrates and method for manuf...
- Patent number 6,638,860
- Issue date Oct 28, 2003
- Hitachi Kokusai Electric Inc.
- Tatsuhisa Matsunaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 6,540,469
- Issue date Apr 1, 2003
- Hitachi Kokusai Electric Inc.
- Tatsuhisa Matsunaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor manufacturing method and semiconductor manufacturing...
- Patent number 6,368,049
- Issue date Apr 9, 2002
- Kokusai Electric Co., Ltd.
- Akihiro Osaka
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Method and apparatus for processing substrates and method for manuf...
- Publication number 20040177926
- Publication date Sep 16, 2004
- Hitachi Kokusai Electric Inc.
- Tatsuhisa Matsunaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate processing apparatus and a method for fabricating a semic...
- Publication number 20030077150
- Publication date Apr 24, 2003
- Hitachi Kokusai Electric Inc.
- Tomoyuki Matsuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus and a method for fabricating a semic...
- Publication number 20030053893
- Publication date Mar 20, 2003
- Hitachi Kokusai Electric Inc.
- Tatsuhisa Matsunaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Semiconductor manfacturing method and semiconductor manfacturing ap...
- Publication number 20020070095
- Publication date Jun 13, 2002
- KOUSAI ELECTRIC CO., LTD.
- Akihiro Osaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus
- Publication number 20020037210
- Publication date Mar 28, 2002
- Hitachi Kokusai Electric Inc.
- Tatsuhisa Matsunaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate processing method and apparatus
- Publication number 20020038164
- Publication date Mar 28, 2002
- Hitachi Kokusai Electric Inc.
- Akihiro Osaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for processing substrates and method for manuf...
- Publication number 20020037645
- Publication date Mar 28, 2002
- Hitachi Kokusai Electric, Inc.
- Tatsuhisa Matsunaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Kouichi Noto

Person

Patents Grantslast 30 patents

Semiconductor device producing apparatus and producing method of se...

Method and apparatus for processing substrates and method for manuf...

Substrate processing method and apparatus

Method and apparatus for processing substrates and method for manuf...

Substrate processing apparatus

Semiconductor manufacturing method and semiconductor manufacturing...

Patents Applicationslast 30 patents

Method and apparatus for processing substrates and method for manuf...

Substrate processing apparatus and a method for fabricating a semic...

Substrate processing apparatus and a method for fabricating a semic...

Semiconductor manfacturing method and semiconductor manfacturing ap...

Substrate processing apparatus

Substrate processing method and apparatus

Method and apparatus for processing substrates and method for manuf...