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Ion source
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Patent number 5,115,135
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Issue date May 19, 1992
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Mitsubishi Denki Kabushiki Kaisha
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Tatsuo Oomori
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H01 - BASIC ELECTRIC ELEMENTS
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Dry etching apparatus
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Patent number 5,108,535
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Issue date Apr 28, 1992
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Mitsubishi Denki Kabushiki Kaisha
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Kouichi Ono
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H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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Ion beam generator
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Patent number 4,716,295
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Issue date Dec 29, 1987
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Mitsubishi Denki Kabushiki Kaisha
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Yoshihiro Ueda
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H01 - BASIC ELECTRIC ELEMENTS
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Laser system
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Patent number 4,710,937
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Issue date Dec 1, 1987
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Mitsubishi Denki Kabushiki Kaisha
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Tatsuo Oomori
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H01 - BASIC ELECTRIC ELEMENTS
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Ion beam generator
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Patent number 4,692,627
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Issue date Sep 8, 1987
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Mitsubishi Denki Kabushiki Kaisha
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Yoshihiro Ueda
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H01 - BASIC ELECTRIC ELEMENTS