Kouichi Owto

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Kawasaki, JP

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Patents Grantslast 30 patents

Information Patent Grant
Carbon containing silicon oxide film having high ashing tolerance a...
- Patent number 7,582,970
- Issue date Sep 1, 2009
- NEC Electronics Corporation
- Sadayuki Ohnishi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
CARBON CONTAINING SILICON OXIDE FILM HAVING HIGH ASHING TOLERANCE A...
- Publication number 20080290522
- Publication date Nov 27, 2008
- NEC Electronics Corporation
- Sadayuki Ohnishi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...