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Kouichi Tanaka
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Nishigou-mura, JP
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Patents Grants
last 30 patents
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Patent Grant
Workpiece holder for polishing, method for producing the same, meth...
Patent number
6,386,957
Issue date
May 14, 2002
Shin-Etsu Handotai Co., Ltd.
Hisashi Masumura
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Grant
Process of polishing wafers
Patent number
5,733,177
Issue date
Mar 31, 1998
Shin-Etsu Handotai Co., Ltd.
Toshihiro Tsuchiya
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing method and apparatus for automatic reduction of wafer tap...
Patent number
5,620,357
Issue date
Apr 15, 1997
Shin-Etsu Handotai Co., Ltd.
Hitoshi Misaka
B24 - GRINDING POLISHING
Information
Patent Grant
Method of polishing semiconductor wafers and apparatus therefor
Patent number
5,584,746
Issue date
Dec 17, 1996
Shin-Etsu Handotai Co., Ltd.
Kouichi Tanaka
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing member and wafer polishing apparatus
Patent number
5,564,965
Issue date
Oct 15, 1996
Shin-Etsu Handotai Co., Ltd.
Kouichi Tanaka
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing apparatus
Patent number
5,081,795
Issue date
Jan 21, 1992
Shin-Etsu Handotai Company, Ltd.
Kouichi Tanaka
B24 - GRINDING POLISHING