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Kouichi Yamamoto
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Hikari, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
8,632,688
Issue date
Jan 21, 2014
Hitachi High-Technologies Corporation
Masaru Izawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Image forming method and charged particle beam apparatus
Patent number
8,203,504
Issue date
Jun 19, 2012
Hitachi High-Technologies Corporation
Atsushi Kobaru
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Image forming method and charged particle beam apparatus
Patent number
7,817,105
Issue date
Oct 19, 2010
Hitachi High-Technologies Corporation
Atsushi Kobaru
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam scanning method and charged particle beam app...
Patent number
7,598,497
Issue date
Oct 6, 2009
Hitachi High-Technologies Corporation
Kouichi Yamamoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Image forming method and charged particle beam apparatus
Patent number
7,187,345
Issue date
Mar 6, 2007
Hitachi High-Technologies Corporation
Atsushi Kobaru
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrostatic chuck and method of treating substrate using electros...
Patent number
6,760,213
Issue date
Jul 6, 2004
Hitachi High-Technologies Corporation
Kouichi Yamamoto
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Patents Applications
last 30 patents
Information
Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
Publication number
20130045547
Publication date
Feb 21, 2013
Masaru IZAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20120186747
Publication date
Jul 26, 2012
Shinji OBAMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR MANUFACTURING METALLIZED CERAMIC SUBSTRATE CHIP
Publication number
20120174390
Publication date
Jul 12, 2012
Tokuyama Corporation
Yasuyuki YAMAMOTO
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
IMAGE FORMING METHOD AND CHARGED PARTICLE BEAM APPARATUS
Publication number
20110032176
Publication date
Feb 10, 2011
Atsushi Kobaru
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR MANUFACTURING METALLIZED CERAMIC SUBSTRATE CHIP
Publication number
20100065310
Publication date
Mar 18, 2010
Yasuyuki Yamamoto
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Charged particle beam scanning method and charged particle beam app...
Publication number
20080054187
Publication date
Mar 6, 2008
Hitachi High-Technologies Corporation
Kouichi Yamamoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Image forming method and charged particle beam apparatus
Publication number
20070159662
Publication date
Jul 12, 2007
Atsushi Kobaru
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
IMAGE FORMING METHOD AND CHARGED PARTICLE BEAM APPARATUS
Publication number
20070024528
Publication date
Feb 1, 2007
Atsushi Kobaru
H01 - BASIC ELECTRIC ELEMENTS