Kouichi Yoshida

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Kurokawa-gun, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 9,875,881
- Issue date Jan 23, 2018
- Tokyo Electron Limited
- Kohichi Nagami
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20140231389
- Publication date Aug 21, 2014
- TOKYO ELECTRON LIMITED
- Kohichi Nagami
- H01 - BASIC ELECTRIC ELEMENTS