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Kouichirou Komatsu
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Tokyo, JP
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last 30 patents
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Patent Grant
Alignment apparatus
Patent number
5,689,339
Issue date
Nov 18, 1997
Nikon Corporation
Kazuya Ota
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Projection scanning exposure apparatus with synchronous mask/wafer...
Patent number
5,506,684
Issue date
Apr 9, 1996
Nikon Corporation
Kazuya Ota
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Projection exposure apparatus
Patent number
5,184,196
Issue date
Feb 2, 1993
Nikon Corporation
Masahiro Nakagawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY