TREA

Kouichirou Tsutahara

Follow

Person

  • Itami, JP
People

Patents Grantslast 30 patents

  • Information Patent Grant

    Polishing agent for processing semiconductor, dispersant used there...
    • Patent number 6,568,996
    • Issue date May 27, 2003
    • Mitsubishi Denki Kabushiki Kaisha
    • Toshio Kobayashi
    • B24 - GRINDING POLISHING
  • Information Patent Grant

    Semiconductor producing apparatus, and wafer vacuum chucking device...
    • Patent number 5,976,260
    • Issue date Nov 2, 1999
    • Mitsubishi Denki Kabushiki Kaisha
    • Yoshimi Kinoshita
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Liquid vaporizing apparatus
    • Patent number 5,803,938
    • Issue date Sep 8, 1998
    • Mitsubishi Denki Kabushiki Kaisha
    • Tooru Yamaguchi
    • B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
  • Information Patent Grant

    Liquid vaporizing apparatus
    • Patent number 5,785,902
    • Issue date Jul 28, 1998
    • Mitsubishi Denki Kabushiki Kaisha
    • Tooru Yamaguchi
    • B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
  • Information Patent Grant

    Liquid vaporizing apparatus
    • Patent number 5,662,838
    • Issue date Sep 2, 1997
    • Mitsubishi Denki Kabushiki Kaisha
    • Tooru Yamaguchi
    • B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
  • Information Patent Grant

    Semiconductor producing apparatus comprising wafer vacuum chucking...
    • Patent number 5,534,073
    • Issue date Jul 9, 1996
    • Mitsubishi Denki Kabushiki Kaisha
    • Yoshimi Kinoshita
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Liquid vaporizing apparatus
    • Patent number 5,520,858
    • Issue date May 28, 1996
    • Mitsubishi Denki Kabushiki Kaisha
    • Tooru Yamaguchi
    • B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
  • Information Patent Grant

    Apparatus for atmospheric chemical vapor deposition
    • Patent number 5,076,207
    • Issue date Dec 31, 1991
    • Mitsubishi Denki Kabushiki Kaisha
    • Akihiro Washitani
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Semiconductor wafer heating device
    • Patent number 5,025,133
    • Issue date Jun 18, 1991
    • Mitsubishi Denki Kabushiki Kaisha
    • Kouichirou Tsutahara
    • B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL

Patents Applicationslast 30 patents