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Kouji Harada
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Kumamoto, JP
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last 30 patents
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Patent Grant
Hydrophobic treatment method involving delivery of a liquid process...
Patent number
5,681,614
Issue date
Oct 28, 1997
Tokyo Electron Limited
Tsutae Omori
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Hydrophobic processing apparatus including a liquid delivery system
Patent number
5,505,781
Issue date
Apr 9, 1996
Tokyo Electron Limited
Tsutae Omori
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...