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Kouji Harada
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Kumamoto-ken, JP
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last 30 patents
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Patent Grant
Substrate processing system
Patent number
5,826,129
Issue date
Oct 20, 1998
Tokyo Electron Limited
Keizo Hasebe
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Method and apparatus for heat-treating substrate
Patent number
5,620,560
Issue date
Apr 15, 1997
Tokyo Electron Limited
Masami Akimoto
H01 - BASIC ELECTRIC ELEMENTS