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Kouji Ikeda
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Fuchu, JP
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last 30 patents
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Patent Grant
Vacuum processing apparatus
Patent number
4,816,638
Issue date
Mar 28, 1989
Anelva Corporation
Katsumi Ukai
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Waste gas exhaust system for vacuum process apparatus
Patent number
4,655,800
Issue date
Apr 7, 1987
Anelva Corporation
Tsutomu Tsukada
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL