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Ion implantation apparatus
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Patent number 9,466,467
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Issue date Oct 11, 2016
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Sumitomo Heavy Industries Ion Technology Co., Ltd.
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Mitsuaki Kabasawa
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H01 - BASIC ELECTRIC ELEMENTS
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High-energy ion implanter
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Patent number 9,390,890
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Issue date Jul 12, 2016
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Sumitomo Heavy Industries Ion Technology Co., Ltd.
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Mitsuaki Kabasawa
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H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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High-energy ion implanter
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Patent number 9,355,847
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Issue date May 31, 2016
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Sumitomo Heavy Industries Ion Technology Co., Ltd.
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Mitsuaki Kabasawa
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H01 - BASIC ELECTRIC ELEMENTS
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Ion implantation apparatus
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Patent number 6,573,517
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Issue date Jun 3, 2003
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Sumitomo Eaton Nova Corporation
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Michiro Sugitani
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G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING