Kouji MAEDA

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Nirasaki City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Vacuum exhaust method
- Patent number 10,014,145
- Issue date Jul 3, 2018
- Tokyo Electron Limited
- Tomohiro Saito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cooling processing apparatus and method for operating the same
- Patent number 9,673,078
- Issue date Jun 6, 2017
- Tokyo Electron Limited
- Tetsuya Miyashita
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLACING TABLE STRUCTURE AND TREATMENT DEVICE
- Publication number 20200381272
- Publication date Dec 3, 2020
- TOKYO ELECTRON LIMITED
- Shinji ORIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM EXHAUST METHOD
- Publication number 20170345609
- Publication date Nov 30, 2017
- Tomohiro SAITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing System, Gate Valve and Substrate Transfer Method
- Publication number 20150371812
- Publication date Dec 24, 2015
- TOKYO ELECTRON LIMITED
- Kouji MAEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COOLING PROCESSING APPARATUS AND METHOD FOR OPERATING THE SAME
- Publication number 20150357222
- Publication date Dec 10, 2015
- TOKYO ELECTRON LIMITED
- Tetsuya MIYASHITA
- H01 - BASIC ELECTRIC ELEMENTS