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Kouji Neishi
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Sendai, JP
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last 30 patents
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Patent Grant
Contact plug structure, semiconductor device, and method for formin...
Patent number
8,531,033
Issue date
Sep 10, 2013
Advanced Interconnect Materials, LLC
Junichi Koike
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Contact plug structure, semiconductor device, and method for formin...
Publication number
20110057317
Publication date
Mar 10, 2011
Tohoku University
Junichi Koike
H01 - BASIC ELECTRIC ELEMENTS