Kouji Okamura

Person

Kumamoto, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Coating and developing apparatus, operating method for same, and st...
- Patent number 7,844,359
- Issue date Nov 30, 2010
- Tokyo Electron Limited
- Tomonori Shin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of detecting extraneous matter on heat processing plate, hea...
- Patent number 7,815,366
- Issue date Oct 19, 2010
- Tokyo Electron Limited
- Kouji Okamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method, substrate processing apparatus and sub...
- Patent number 7,060,115
- Issue date Jun 13, 2006
- Tokyo Electron Limited
- Hiroharu Hashiguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Judging method and processing apparatus
- Patent number 6,568,847
- Issue date May 27, 2003
- Tokyo Electron Limited
- Yuuichi Nishijima
- G01 - MEASURING TESTING
Information Patent Grant
Substrate processing method apparatus and substrate carrying method
- Patent number 6,461,986
- Issue date Oct 8, 2002
- Tokyo Electron Limited
- Hiroharu Hashiguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Resist processing system and resist processing method
- Patent number 6,147,329
- Issue date Nov 14, 2000
- Tokyo Electron Limited
- Kouji Okamura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Resist processing process
- Patent number 5,849,602
- Issue date Dec 15, 1998
- Tokyo Electron Limited
- Kouji Okamura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
CONTROL DEVICE, SEMICONDUCTOR MANUFACTURING SYSTEM, AND CONTROL MET...
- Publication number 20240385582
- Publication date Nov 21, 2024
- TOKYO ELECTRON LIMITED
- Kiminari SAKAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF DETECTING EXTRANEOUS MATTER ON HEAT PROCESSING PLATE, HEA...
- Publication number 20090076763
- Publication date Mar 19, 2009
- TOKYO ELECTRON LIMITED
- Kouji Okamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATING AND DEVELOPING APPARATUS, OPERATING METHOD FOR SAME, AND ST...
- Publication number 20080299502
- Publication date Dec 4, 2008
- TOKYO ELECTRON LIMITED
- Tomonori SHIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing method, substrate processing apparatus and sub...
- Publication number 20030003774
- Publication date Jan 2, 2003
- Hiroharu Hashiguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Judging method and processing apparatus
- Publication number 20020027942
- Publication date Mar 7, 2002
- TOKYO ELECTRON LIMITED
- Yuuichi Nishijima
- G01 - MEASURING TESTING
Information Patent Application
Substrate processing method, substrate processing apparatus and sub...
- Publication number 20020009902
- Publication date Jan 24, 2002
- Hiroharu Hashiguchi
- H01 - BASIC ELECTRIC ELEMENTS

Kouji Okamura

Person

Patents Grantslast 30 patents

Coating and developing apparatus, operating method for same, and st...

Method of detecting extraneous matter on heat processing plate, hea...

Substrate processing method, substrate processing apparatus and sub...

Judging method and processing apparatus

Substrate processing method apparatus and substrate carrying method

Resist processing system and resist processing method

Resist processing process

Patents Applicationslast 30 patents

CONTROL DEVICE, SEMICONDUCTOR MANUFACTURING SYSTEM, AND CONTROL MET...

METHOD OF DETECTING EXTRANEOUS MATTER ON HEAT PROCESSING PLATE, HEA...

COATING AND DEVELOPING APPARATUS, OPERATING METHOD FOR SAME, AND ST...

Substrate processing method, substrate processing apparatus and sub...

Judging method and processing apparatus

Substrate processing method, substrate processing apparatus and sub...