Kouji SOGABE

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Susono-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Cleaning method and a vacuum processing apparatus
- Patent number 8,357,265
- Issue date Jan 22, 2013
- Ulvac, Inc.
- Kouji Sogabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Film Forming Method
- Publication number 20220056571
- Publication date Feb 24, 2022
- Ulvac, Inc.
- Kengo Tsutsumi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM-FORMING APPARATUS, AND METHOD FOR MAINTAINING FILM-FORMING APP...
- Publication number 20130199572
- Publication date Aug 8, 2013
- ULVAC, Inc.
- Takuro Hayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING CHUCK PLATE FOR USE IN ELECTROSTATIC CHUCK
- Publication number 20110256810
- Publication date Oct 20, 2011
- Takahiro Nanba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING METHOD AND A VACUUM PROCESSING APPARATUS
- Publication number 20090120456
- Publication date May 14, 2009
- ULVAC, Inc.
- Kouji SOGABE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...