Kouji Tometsuka

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method
- Patent number 8,173,214
- Issue date May 8, 2012
- Hitachi Kokusai Electric Inc.
- Kouji Tometsuka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method
- Patent number 7,553,518
- Issue date Jun 30, 2009
- Hitachi Kokusai Electric Inc.
- Kouji Tometsuka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method
- Patent number 7,003,219
- Issue date Feb 21, 2006
- Hitachi Kokusai Electric Inc.
- Kouji Tometsuka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method for manufacturing semicon...
- Patent number 6,923,867
- Issue date Aug 2, 2005
- Hitachi Kokusai Electric Inc.
- Tomoshi Taniyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method for fabricating semicondu...
- Patent number 6,780,251
- Issue date Aug 24, 2004
- Hitachi Kokusai Electric, Inc.
- Kouji Tometsuka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method for manufacturing semicon...
- Patent number 6,712,909
- Issue date Mar 30, 2004
- Hitachi Kokusai Electric Inc.
- Kouji Tometsuka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 6,540,465
- Issue date Apr 1, 2003
- Hitachi Kokusai Electric Inc.
- Kouji Tometsuka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hydrogen annealing process and apparatus therefor
- Patent number 6,527,884
- Issue date Mar 4, 2003
- Hitachi Kokusai Electric, Inc.
- Yasunori Takakuwa
- C21 - METALLURGY OF IRON
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 6,495,473
- Issue date Dec 17, 2002
- Hitachi Kokusai Electric Inc.
- Tomoshi Taniyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method for manufacturing semicon...
- Patent number 6,482,753
- Issue date Nov 19, 2002
- Hitachi Kokusai Electric Inc.
- Kouji Tometsuka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and maintenance method therefor
- Patent number 6,332,898
- Issue date Dec 25, 2001
- Kokusai Electric Co., Ltd.
- Kouji Tometsuka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor fabricating apparatus, method for modifying positiona...
- Patent number 6,318,944
- Issue date Nov 20, 2001
- Kokusai Electric Co., Ltd.
- Kazuhiro Shimeno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 6,251,189
- Issue date Jun 26, 2001
- Kokusai Electric Co., Ltd.
- Shigeru Odake
- C30 - CRYSTAL GROWTH
Information Patent Grant
Substrate processing apparatus and maintenance method therefor
- Patent number 6,143,040
- Issue date Nov 7, 2000
- Kokusai Electric Co., Ltd.
- Kouji Tometsuka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer transfer plate
- Patent number 5,669,644
- Issue date Sep 23, 1997
- Kokusai Electric Co., Ltd.
- Hideki Kaihotsu
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20090246962
- Publication date Oct 1, 2009
- Hitachi Kokusai Electric Inc.
- Kouji Tometsuka
- C30 - CRYSTAL GROWTH
Information Patent Application
Substrate processing method
- Publication number 20060081334
- Publication date Apr 20, 2006
- Hitachi Kokusai Electric Inc.
- Kouji Tometsuka
- C30 - CRYSTAL GROWTH
Information Patent Application
Substrate processing method
- Publication number 20050008352
- Publication date Jan 13, 2005
- Hitachi Kokusai Electric Inc.
- Kouji Tometsuka
- C30 - CRYSTAL GROWTH
Information Patent Application
Substrate processing apparatus and method for fabricating semicondu...
- Publication number 20030019585
- Publication date Jan 30, 2003
- HITACHI KOKUSAI ELECTRIC INC.
- Kouji Tometsuka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate processing apparatus and method for manufacturing semicon...
- Publication number 20030015138
- Publication date Jan 23, 2003
- Hitachi Kokusai Electric Inc.
- Kouji Tometsuka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate processing apparatus and method for manufacturing semicon...
- Publication number 20030017714
- Publication date Jan 23, 2003
- Hitachi Kokusai Electric Inc.
- Tomoshi Taniyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD FOR MANUFACTURING SEMICON...
- Publication number 20020168854
- Publication date Nov 14, 2002
- Hitachi Kokusai Electric Inc.
- Kouji Tometsuka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20020168877
- Publication date Nov 14, 2002
- Tomoshi Taniyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate processing apparatus and method for manufacturing semicon...
- Publication number 20020132497
- Publication date Sep 19, 2002
- Hitachi Kokusai Electric Inc.
- Kouji Tometsuka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate processing equipment and method and covering member for u...
- Publication number 20020034595
- Publication date Mar 21, 2002
- Kouji Tometsuka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate processing apparatus and method
- Publication number 20020014311
- Publication date Feb 7, 2002
- Hitachi Kokusai Electric Inc.
- Kouji Tometsuka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate processing apparatus
- Publication number 20010052325
- Publication date Dec 20, 2001
- Kouji Tometsuka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate processeing apparatus, substrate processing method and el...
- Publication number 20010029108
- Publication date Oct 11, 2001
- Kouji Tometsuka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Kouji Tometsuka

Person

Patents Grantslast 30 patents

Substrate processing method

Substrate processing method

Substrate processing method

Substrate processing apparatus and method for manufacturing semicon...

Substrate processing apparatus and method for fabricating semicondu...

Substrate processing apparatus and method for manufacturing semicon...

Substrate processing apparatus

Hydrogen annealing process and apparatus therefor

Substrate processing apparatus and method of manufacturing semicond...

Substrate processing apparatus and method for manufacturing semicon...

Substrate processing apparatus and maintenance method therefor

Semiconductor fabricating apparatus, method for modifying positiona...

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and maintenance method therefor

Wafer transfer plate

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING METHOD

Substrate processing method

Substrate processing method

Substrate processing apparatus and method for fabricating semicondu...

Substrate processing apparatus and method for manufacturing semicon...

Substrate processing apparatus and method for manufacturing semicon...

SUBSTRATE PROCESSING APPARATUS AND METHOD FOR MANUFACTURING SEMICON...

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...

Substrate processing apparatus and method for manufacturing semicon...

Substrate processing equipment and method and covering member for u...

Substrate processing apparatus and method

Substrate processing apparatus

Substrate processeing apparatus, substrate processing method and el...