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Kouki Okawauchi
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Kanagawa, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Testing apparatus using scanning electron microscope
Patent number
6,953,939
Issue date
Oct 11, 2005
Sony Corporation
Tetsuo Abe
G01 - MEASURING TESTING
Information
Patent Grant
Defect inspection apparatus and defect inspection method
Patent number
6,524,871
Issue date
Feb 25, 2003
Sony Corporation
Kouki Okawauchi
G01 - MEASURING TESTING
Information
Patent Grant
Defect inspection apparatus and defect inspection method
Patent number
6,337,488
Issue date
Jan 8, 2002
Sony Corporation
Kouki Okawauchi
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
Inspection device using scanning electron microscope
Publication number
20040144928
Publication date
Jul 29, 2004
Tetsuo Abe
G01 - MEASURING TESTING
Information
Patent Application
Defect inspection apparatus and defect inspection method
Publication number
20020105636
Publication date
Aug 8, 2002
Kouki Okawauchi
G01 - MEASURING TESTING
Information
Patent Application
Pattern inspecting apparatus, pattern inspecting method, aligner, a...
Publication number
20020067490
Publication date
Jun 6, 2002
Kouki Okawauchi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY