Koukichi HIROSHIRO

Person

Tosu-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and method of processing substrate
- Patent number 11,723,259
- Issue date Aug 8, 2023
- Tokyo Electron Limited
- Koukichi Hiroshiro
Information Patent Grant
Substrate processing method, substrate processing device and etchin...
- Patent number 11,306,249
- Issue date Apr 19, 2022
- Tokyo Electron Limited
- Koukichi Hiroshiro
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,049,723
- Issue date Jun 29, 2021
- Tokyo Electron Limited
- Koukichi Hiroshiro
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Chemical-liquid mixing method and chemical-liquid mixing apparatus
- Patent number 9,415,356
- Issue date Aug 16, 2016
- Tokyo Electron Limited
- Hiroshi Tanaka
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Chemical-liquid mixing method and chemical-liquid mixing apparatus
- Patent number 9,339,775
- Issue date May 17, 2016
- Tokyo Electron Limited
- Hiroshi Tanaka
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Chemical-liquid mixing method and chemical-liquid mixing apparatus
- Patent number 9,099,502
- Issue date Aug 4, 2015
- Tokyo Electron Limited
- Hiroshi Tanaka
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Fluid heater, manufacturing method thereof, substrate processing ap...
- Patent number 8,701,308
- Issue date Apr 22, 2014
- Tokyo Electron Limited
- Koukichi Hiroshiro
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Template treatment method, program, computer storage medium, templa...
- Patent number 8,522,712
- Issue date Sep 3, 2013
- Tokyo Electron Limited
- Koukichi Hiroshiro
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Imprint method, computer storage medium and imprint apparatus
- Patent number 8,468,943
- Issue date Jun 25, 2013
- Tokyo Electron Limited
- Koukichi Hiroshiro
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Substrate processing method and non-transitory storage medium for c...
- Patent number 8,303,724
- Issue date Nov 6, 2012
- Tokyo Electron Limited
- Koukichi Hiroshiro
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate cleaning method, substrate cleaning system and program st...
- Patent number 8,152,928
- Issue date Apr 10, 2012
- Tokyo Electron Limited
- Tsukasa Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus including a drying mechanism using a...
- Patent number 8,015,984
- Issue date Sep 13, 2011
- Tokyo Electron Limited
- Koukichi Hiroshiro
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 7,998,306
- Issue date Aug 16, 2011
- Tokyo Electron Limited
- Koukichi Hiroshiro
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240332040
- Publication date Oct 3, 2024
- TOKYO ELECTRON LIMITED
- Koukichi HIROSHIRO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20230386855
- Publication date Nov 30, 2023
- TOKYO ELECTRON LIMITED
- Koji Kagawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20220316059
- Publication date Oct 6, 2022
- TOKYO ELECTRON LIMITED
- Koukichi HIROSHIRO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING DEVICE AND ETCHING LIQUID
- Publication number 20220213382
- Publication date Jul 7, 2022
- TOKYO ELECTRON LIMITED
- Koukichi Hiroshiro
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF PROCESSING SUBSTRATE
- Publication number 20210391539
- Publication date Dec 16, 2021
- TOKYO ELECTRON LIMITED
- Koukichi HIROSHIRO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING DEVICE AND ETCHIN...
- Publication number 20210032537
- Publication date Feb 4, 2021
- TOKYO ELECTRON LIMITED
- Koukichi Hiroshiro
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20200219730
- Publication date Jul 9, 2020
- TOKYO ELECTRON LIMITED
- Koukichi Hiroshiro
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHEMICAL-LIQUID MIXING METHOD AND CHEMICAL-LIQUID MIXING APPARATUS
- Publication number 20160228832
- Publication date Aug 11, 2016
- TOKYO ELECTRON LIMITED
- Hiroshi TANAKA
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
CHEMICAL-LIQUID MIXING METHOD AND CHEMICAL-LIQUID MIXING APPARATUS
- Publication number 20150290599
- Publication date Oct 15, 2015
- TOKYO ELECTRON LIMITED
- Hiroshi TANAKA
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
IMPRINT METHOD, COMPUTER STORAGE MEDIUM AND IMPRINT APPARATUS
- Publication number 20120152136
- Publication date Jun 21, 2012
- TOKYO ELECTRON LIMITED
- Koukichi Hiroshiro
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
SUBSTRATE PROCESSING METHOD AND NON-TRANSITORY STORAGE MEDIUM FOR C...
- Publication number 20110290280
- Publication date Dec 1, 2011
- TOKYO ELECTRON LIMITED
- Koukichi HIROSHIRO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPLATE TREATMENT METHOD, PROGRAM, COMPUTER STORAGE MEDIUM, TEMPLA...
- Publication number 20110117291
- Publication date May 19, 2011
- TOKYO ELECTRON LIMITED
- Koukichi HIROSHIRO
- B82 - NANO-TECHNOLOGY
Information Patent Application
FLUID HEATER, MANUFACTURING METHOD THEREOF, SUBSTRATE PROCESSING AP...
- Publication number 20110099838
- Publication date May 5, 2011
- TOKYO ELECTRON LIMITED
- Koukichi Hiroshiro
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, PROGRA...
- Publication number 20100206337
- Publication date Aug 19, 2010
- TOKYO ELECTRON LIMITED
- Koukichi Hiroshiro
- B08 - CLEANING
Information Patent Application
Substrate processing apparatus
- Publication number 20090139656
- Publication date Jun 4, 2009
- TOKYO ELECTRON LIMITED
- Koukichi Hiroshiro
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing Apparatus and Substrate Processing Method
- Publication number 20090101186
- Publication date Apr 23, 2009
- Koukichi Hiroshiro
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate cleaning apparatus, substrate cleaning method, and storag...
- Publication number 20080178910
- Publication date Jul 31, 2008
- TOKYO ELECTRON LIMITED
- Koukichi Hiroshiro
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Chemical-liquid mixing method and chemical-liquid mixing apparatus
- Publication number 20080031083
- Publication date Feb 7, 2008
- TOKYO ELECTRON LIMITED
- Hiroshi Tanaka
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
Substrate cleaning method, substrate cleaning system and program st...
- Publication number 20070267040
- Publication date Nov 22, 2007
- TOKYO ELECTRON LIMITED
- Tsukasa Watanabe
- H01 - BASIC ELECTRIC ELEMENTS

Koukichi HIROSHIRO

Person

Patents Grantslast 30 patents

Substrate processing apparatus and method of processing substrate

Substrate processing method, substrate processing device and etchin...

Substrate processing method and substrate processing apparatus

Chemical-liquid mixing method and chemical-liquid mixing apparatus

Chemical-liquid mixing method and chemical-liquid mixing apparatus

Chemical-liquid mixing method and chemical-liquid mixing apparatus

Fluid heater, manufacturing method thereof, substrate processing ap...

Template treatment method, program, computer storage medium, templa...

Imprint method, computer storage medium and imprint apparatus

Substrate processing method and non-transitory storage medium for c...

Substrate cleaning method, substrate cleaning system and program st...

Substrate processing apparatus including a drying mechanism using a...

Substrate processing apparatus

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING DEVICE AND ETCHING LIQUID

SUBSTRATE PROCESSING APPARATUS AND METHOD OF PROCESSING SUBSTRATE

SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING DEVICE AND ETCHIN...

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

CHEMICAL-LIQUID MIXING METHOD AND CHEMICAL-LIQUID MIXING APPARATUS

CHEMICAL-LIQUID MIXING METHOD AND CHEMICAL-LIQUID MIXING APPARATUS

IMPRINT METHOD, COMPUTER STORAGE MEDIUM AND IMPRINT APPARATUS

SUBSTRATE PROCESSING METHOD AND NON-TRANSITORY STORAGE MEDIUM FOR C...

TEMPLATE TREATMENT METHOD, PROGRAM, COMPUTER STORAGE MEDIUM, TEMPLA...

FLUID HEATER, MANUFACTURING METHOD THEREOF, SUBSTRATE PROCESSING AP...

SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, PROGRA...

Substrate processing apparatus

Substrate Processing Apparatus and Substrate Processing Method

Substrate cleaning apparatus, substrate cleaning method, and storag...

Chemical-liquid mixing method and chemical-liquid mixing apparatus

Substrate cleaning method, substrate cleaning system and program st...