Koukou SUU

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Chigasaki-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Multi-layered film, method of manufacturing the same, and manufactu...
- Patent number 10,553,777
- Issue date Feb 4, 2020
- Ulvac, Inc.
- Hiroki Kobayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-layered film and method of manufacturing the same
- Patent number 9,985,196
- Issue date May 29, 2018
- Ulvac, Inc.
- Hiroki Kobayashi
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Ashing device
- Patent number 9,466,475
- Issue date Oct 11, 2016
- ULVAC, Inc.
- Masahisa Ueda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Resistance change device, and method for producing same
- Patent number 9,343,207
- Issue date May 17, 2016
- ULVAC, Inc.
- Natsuki Fukuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Resistance change element and method for producing the same
- Patent number 9,281,477
- Issue date Mar 8, 2016
- ULVAC, Inc.
- Yutaka Nishioka
- G11 - INFORMATION STORAGE
Information Patent Grant
Method of manufacturing variable resistance element and apparatus f...
- Patent number 9,269,903
- Issue date Feb 23, 2016
- ULVAC, Inc.
- Yutaka Nishioka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thin-film forming method and thin-film forming apparatus
- Patent number 9,145,605
- Issue date Sep 29, 2015
- ULVAC, Inc.
- Takeshi Masuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ashing apparatus
- Patent number 9,059,105
- Issue date Jun 16, 2015
- ULVAC, Inc.
- Masahisa Ueda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching method
- Patent number 8,993,449
- Issue date Mar 31, 2015
- ULVAC, Inc.
- Yasuhiro Morikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for the preparation of film
- Patent number 8,591,655
- Issue date Nov 26, 2013
- ULVAC, Inc.
- Takeshi Masuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Shower head, device and method for manufacturing thin films
- Patent number 8,262,798
- Issue date Sep 11, 2012
- ULVAC, Inc.
- Takakazu Yamada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film-forming apparatus and film-forming method
- Patent number 8,168,001
- Issue date May 1, 2012
- ULVAC, Inc.
- Hiroto Uchida
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Etching method and system
- Patent number 8,153,926
- Issue date Apr 10, 2012
- Ulvac, Inc.
- Yasuhiro Morikawa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Dry cleaning method for plasma processing apparatus
- Patent number 8,133,325
- Issue date Mar 13, 2012
- Ulvac, Inc.
- Masahisa Ueda
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Mixing box, and apparatus and method for producing films
- Patent number 8,118,935
- Issue date Feb 21, 2012
- ULVAC, Inc.
- Takakazu Yamada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Etching method and system
- Patent number 7,728,252
- Issue date Jun 1, 2010
- ULVAC, Inc.
- Yasuhiro Morikawa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Device and method for manufacturing thin films
- Patent number 7,618,493
- Issue date Nov 17, 2009
- Ulvac, Inc.
- Takakazu Yamada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mixer, and device and method for manufacturing thin-film
- Patent number 6,933,010
- Issue date Aug 23, 2005
- ULVAC, Inc.
- Takakazu Yamada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering apparatus
- Patent number 6,521,105
- Issue date Feb 18, 2003
- Ulvac, Inc.
- Noriaki Tani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR MANUFACTURING PHASE CHANGE MEMORY
- Publication number 20200098986
- Publication date Mar 26, 2020
- International Business Machines Corporation
- Gloria Wing Yun FRACZAK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of Depositing Aluminum Oxide Film, Method of Forming the Sam...
- Publication number 20180057929
- Publication date Mar 1, 2018
- Ulvac, Inc.
- Yuusuke Miyaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-LAYERED FILM AND METHOD OF MANUFACTURING THE SAME
- Publication number 20170148975
- Publication date May 25, 2017
- ULVAC, Inc.
- Hiroki KOBAYASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-LAYERED FILM, METHOD OF MANUFACTURING THE SAME, AND MANUFACTU...
- Publication number 20170141289
- Publication date May 18, 2017
- ULVAC, Inc.
- Hiroki KOBAYASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING MULTI-LAYERED FILM AND MULTI-LAYERED FILM
- Publication number 20170133581
- Publication date May 11, 2017
- ULVAC, Inc.
- Hiroki KOBAYASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PZT THIN FILM LAMINATE AND MANUFACTURING METHOD THEREOF
- Publication number 20170104147
- Publication date Apr 13, 2017
- ULVAC, Inc.
- Mitsutaka HIROSE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for Forming Carbon Electrode Film, Carbon Electrode, and Met...
- Publication number 20170051396
- Publication date Feb 23, 2017
- Ulvac, Inc.
- Yuusuke Miyaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING MULTI-LAYERED FILM, AND MULTI-LAYERED FILM
- Publication number 20170018702
- Publication date Jan 19, 2017
- Ulvac, Inc.
- Hiroki KOBAYASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Variable-Resisance Element and Production Method Therefor
- Publication number 20170012197
- Publication date Jan 12, 2017
- Ulvac, Inc.
- Natsuki Fukuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEPOSITION METHOD AND DEPOSITION APPARATUS
- Publication number 20150056373
- Publication date Feb 26, 2015
- Ulvac, Inc.
- Natsuki Fukuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ASHING DEVICE
- Publication number 20150013715
- Publication date Jan 15, 2015
- Ulvac, Inc.
- Masahisa Ueda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Resistance Change Device, and Method for Producing Same
- Publication number 20140361864
- Publication date Dec 11, 2014
- Natsuki Fukuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Resistance Change Element and Method for Producing the Same
- Publication number 20140166966
- Publication date Jun 19, 2014
- Ulvac, Inc.
- Yutaka Nishioka
- G11 - INFORMATION STORAGE
Information Patent Application
METHOD OF MANUFACTURING VARIABLE RESISTANCE ELEMENT AND APPARATUS F...
- Publication number 20140102879
- Publication date Apr 17, 2014
- Ulvac, Inc.
- Yutaka Nishioka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THIN-FILM FORMING METHOD AND THIN-FILM FORMING APPARATUS
- Publication number 20130224381
- Publication date Aug 29, 2013
- Ulvac, Inc.
- Takeshi Masuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THIN FILM FORMING METHOD AND THIN FILM FORMING APPARATUS
- Publication number 20130216710
- Publication date Aug 22, 2013
- Ulvac, Inc.
- Takeshi Masuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THIN FILM MANUFACTURING APPARATUS, THIN FILM MANUFACTURING METHOD A...
- Publication number 20130023062
- Publication date Jan 24, 2013
- Takeshi Masuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MANUFACTURING METHOD FOR LiCoO2, SINTERED BODY AND SPUTTERING TARGET
- Publication number 20120305392
- Publication date Dec 6, 2012
- Ulvac, Inc.
- Poong Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MANUFACTURING METHOD FOR LiCoO2 SINTERED BODY AND SPUTTERING TARGET
- Publication number 20120305391
- Publication date Dec 6, 2012
- ULVAC, Inc.
- Poong Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ETCHING METHOD
- Publication number 20120171869
- Publication date Jul 5, 2012
- Yasuhiro Morikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHALCOGENIDE FILM AND MANUFACTURING METHOD THEREOF
- Publication number 20110198555
- Publication date Aug 18, 2011
- ULVAC, Inc.
- Shin Kikuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma Processing Method and Plasma Processing Apparatus
- Publication number 20110180388
- Publication date Jul 28, 2011
- Ulvac, Inc.
- Yasuhiro Morikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING METHOD
- Publication number 20110117742
- Publication date May 19, 2011
- ULVAC, Inc.
- Yasuhiro Morikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHALCOGENIDE FILM AND METHOD OF MANUFACTURING SAME
- Publication number 20100314599
- Publication date Dec 16, 2010
- ULVAC, Inc.
- Shin Kikuchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR DRY ETCHING INTERLAYER INSULATING FILM
- Publication number 20100219158
- Publication date Sep 2, 2010
- Yasuhiro Morikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHOD AND ETCHING APPARATUS
- Publication number 20100213170
- Publication date Aug 26, 2010
- ULVAC, Inc.
- Yutaka Kokaze
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ETCHING METHOD AND SYSTEM
- Publication number 20100203737
- Publication date Aug 12, 2010
- ULVAC, Inc.
- Yasuhiro MORIKAWA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ASHING DEVICE
- Publication number 20100193131
- Publication date Aug 5, 2010
- Ulvac, Inc.
- Masahisa Ueda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PLASMA PROCESSING APPARATUS AND MANUFACTURING METHOD OF DEPOSITION-...
- Publication number 20100151150
- Publication date Jun 17, 2010
- ULVAC, Inc.
- Yutaka Kokaze
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DRY ETCHING APPARATUS AND DRY ETCHING METHOD
- Publication number 20100133235
- Publication date Jun 3, 2010
- Yasuhiro Morikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Person

Patents Grantslast 30 patents

Multi-layered film, method of manufacturing the same, and manufactu...

Multi-layered film and method of manufacturing the same

Ashing device

Resistance change device, and method for producing same

Resistance change element and method for producing the same

Method of manufacturing variable resistance element and apparatus f...

Thin-film forming method and thin-film forming apparatus

Ashing apparatus

Etching method

Apparatus for the preparation of film

Shower head, device and method for manufacturing thin films

Film-forming apparatus and film-forming method

Etching method and system

Dry cleaning method for plasma processing apparatus

Mixing box, and apparatus and method for producing films

Etching method and system

Device and method for manufacturing thin films

Mixer, and device and method for manufacturing thin-film

Sputtering apparatus

Patents Applicationslast 30 patents

METHOD FOR MANUFACTURING PHASE CHANGE MEMORY

Method of Depositing Aluminum Oxide Film, Method of Forming the Sam...

MULTI-LAYERED FILM AND METHOD OF MANUFACTURING THE SAME

MULTI-LAYERED FILM, METHOD OF MANUFACTURING THE SAME, AND MANUFACTU...

METHOD OF MANUFACTURING MULTI-LAYERED FILM AND MULTI-LAYERED FILM

PZT THIN FILM LAMINATE AND MANUFACTURING METHOD THEREOF

Method for Forming Carbon Electrode Film, Carbon Electrode, and Met...

METHOD OF MANUFACTURING MULTI-LAYERED FILM, AND MULTI-LAYERED FILM

Variable-Resisance Element and Production Method Therefor

DEPOSITION METHOD AND DEPOSITION APPARATUS

ASHING DEVICE

Resistance Change Device, and Method for Producing Same

Resistance Change Element and Method for Producing the Same

METHOD OF MANUFACTURING VARIABLE RESISTANCE ELEMENT AND APPARATUS F...

THIN-FILM FORMING METHOD AND THIN-FILM FORMING APPARATUS

THIN FILM FORMING METHOD AND THIN FILM FORMING APPARATUS

THIN FILM MANUFACTURING APPARATUS, THIN FILM MANUFACTURING METHOD A...

MANUFACTURING METHOD FOR LiCoO2, SINTERED BODY AND SPUTTERING TARGET

MANUFACTURING METHOD FOR LiCoO2 SINTERED BODY AND SPUTTERING TARGET

ETCHING METHOD

CHALCOGENIDE FILM AND MANUFACTURING METHOD THEREOF

Plasma Processing Method and Plasma Processing Apparatus

PLASMA PROCESSING METHOD

CHALCOGENIDE FILM AND METHOD OF MANUFACTURING SAME

METHOD FOR DRY ETCHING INTERLAYER INSULATING FILM

ETCHING METHOD AND ETCHING APPARATUS

ETCHING METHOD AND SYSTEM

ASHING DEVICE

PLASMA PROCESSING APPARATUS AND MANUFACTURING METHOD OF DEPOSITION-...

DRY ETCHING APPARATUS AND DRY ETCHING METHOD