Koumei Matsuzava

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Nirasaki-City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method of forming a metal layer using an intermittent precursor gas...
- Patent number 6,924,223
- Issue date Aug 2, 2005
- Tokyo Electron Limited
- Hideaki Yamasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Method of forming a metal layer using an intermittent precursor gas...
- Publication number 20050069632
- Publication date Mar 31, 2005
- TOKYO ELECTRON LIMITED
- Hideaki Yamasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...