TREA

Koumei Matsuzawa

Follow

Person

  • Uozu-shi, JP
People

Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    FILM-FORMING APPARATUS AND FILM-FORMING METHOD
    • Publication number 20090029047
    • Publication date Jan 29, 2009
    • Tokyo Electron Limited
    • Naoki Yoshii
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE TREATMENT METHOD AND FILM FORMING METHOD, FILM FORMING AP...
    • Publication number 20080020934
    • Publication date Jan 24, 2008
    • TOKYO ELECTRON LIMITED
    • Naoki YOSHII
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Method for cleaning substrate processing chamber
    • Publication number 20060124151
    • Publication date Jun 15, 2006
    • TOKYO ELECTRON LIMITED
    • Hideaki Yamasaki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Film deposition method
    • Publication number 20060121307
    • Publication date Jun 8, 2006
    • TOKYO ELECTRON LIMITED
    • Koumei Matsuzawa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Deposition method
    • Publication number 20060099348
    • Publication date May 11, 2006
    • TOKYO ELECTRON LIMITED
    • Masaki Narushima
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Film formation method
    • Publication number 20060084266
    • Publication date Apr 20, 2006
    • TOKYO ELECTRON LIMITED
    • Masaki Narushima
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    CVD process capable of reducing incubation time
    • Publication number 20040025789
    • Publication date Feb 12, 2004
    • TOKYO ELECTRON LIMITED
    • Hideaki Yamasaki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...