Kousuke YOSHIHARA

Person

Koshi-Shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Developing treatment method, computer storage medium and developing...
- Patent number 11,720,026
- Issue date Aug 8, 2023
- Tokyo Electron Limited
- Akiko Kai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and method of adjusting substrate pr...
- Patent number 11,476,136
- Issue date Oct 18, 2022
- Tokyo Electron Limited
- Kenichi Shigetomi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid processing device and liquid processing method
- Patent number 11,465,168
- Issue date Oct 11, 2022
- Tokyo Electron Limited
- Hiroyuki Ide
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing liquid supplying apparatus and processing liquid supplyi...
- Patent number 11,342,198
- Issue date May 24, 2022
- Tokyo Electron Limited
- Yuichi Terashita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Solution treatment apparatus and cleaning method for solution treat...
- Patent number 11,235,350
- Issue date Feb 1, 2022
- Tokyo Electron Limited
- Satoshi Shimmura
- B08 - CLEANING
Information Patent Grant
Film forming method, storage medium, and film forming system
- Patent number 11,141,758
- Issue date Oct 12, 2021
- Tokyo Electron Limited
- Kentaro Yoshihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid processing apparatus, liquid processing method, and storage...
- Patent number 10,734,251
- Issue date Aug 4, 2020
- Tokyo Electron Limited
- Koji Takayanagi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating film forming method, coating film forming apparatus, and st...
- Patent number 10,672,606
- Issue date Jun 2, 2020
- Tokyo Electron Limited
- Kousuke Yoshihara
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate processing apparatus and method of adjusting substrate pr...
- Patent number 10,504,757
- Issue date Dec 10, 2019
- Tokyo Electron Limited
- Kenichi Shigetomi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Developing apparatus, developing method and storage medium
- Patent number 10,289,004
- Issue date May 14, 2019
- Tokyo Electron Limited
- Kousuke Yoshihara
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Processing liquid supplying apparatus and method of supplying proce...
- Patent number 10,268,116
- Issue date Apr 23, 2019
- Tokyo Electron Limited
- Kousuke Yoshihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Cover plate for wind mark control in spin coating process
- Patent number 10,262,880
- Issue date Apr 16, 2019
- Tokyo Electron Limited
- Derek W. Bassett
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Developing method, developing apparatus and storage medium
- Patent number 10,120,285
- Issue date Nov 6, 2018
- Tokyo Electron Limited
- Kousuke Yoshihara
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Exposure apparatus, resist pattern forming method, and storage medium
- Patent number 10,101,669
- Issue date Oct 16, 2018
- Tokyo Electron Limited
- Seiji Nagahara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Processing liquid supplying apparatus and processing liquid supplyi...
- Patent number 10,074,546
- Issue date Sep 11, 2018
- Tokyo Electron Limited
- Yuichi Terashita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating film forming method, coating film forming apparatus, and st...
- Patent number 10,068,763
- Issue date Sep 4, 2018
- Tokyo Electron Limited
- Kousuke Yoshihara
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Coating method, computer storage medium and coating apparatus
- Patent number 10,048,664
- Issue date Aug 14, 2018
- Tokyo Electron Limited
- Takafumi Hasimoto
- G05 - CONTROLLING REGULATING
Information Patent Grant
Chemical supply system, substrate treatment apparatus incorporating...
- Patent number 10,035,173
- Issue date Jul 31, 2018
- Tokyo Electron Limited
- Toshinobu Furusho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Solution treatment apparatus and solution treatment method
- Patent number 10,022,652
- Issue date Jul 17, 2018
- Tokyo Electron Limited
- Kousuke Yoshihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate treatment system
- Patent number 10,025,190
- Issue date Jul 17, 2018
- Tokyo Electron Limited
- Seiji Nagahara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Coating treatment method with airflow control, and non-transitory r...
- Patent number 9,947,534
- Issue date Apr 17, 2018
- Tokyo Electron Limited
- Kousuke Yoshihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Solution treatment apparatus and solution treatment method
- Patent number 9,878,267
- Issue date Jan 30, 2018
- Tokyo Electron Limited
- Kousuke Yoshihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Processing liquid supplying apparatus and method of supplying proce...
- Patent number 9,846,363
- Issue date Dec 19, 2017
- Tokyo Electron Limited
- Kousuke Yoshihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Liquid treatment apparatus and method and non-transitory storage me...
- Patent number 9,817,323
- Issue date Nov 14, 2017
- Tokyo Electron Limited
- Yuichi Yoshida
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate cleaning apparatus, substrate cleaning method and non-tra...
- Patent number 9,805,958
- Issue date Oct 31, 2017
- Tokyo Electron Limited
- Atsushi Ookouchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film forming method, computer storage medium, and film forming system
- Patent number 9,741,559
- Issue date Aug 22, 2017
- Tokyo Electron Limited
- Satoru Shimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Solution treatment apparatus and solution treatment method
- Patent number 9,731,226
- Issue date Aug 15, 2017
- Tokyo Electron Limited
- Kousuke Yoshihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Processing-liquid supply apparatus and processing-liquid supply method
- Patent number 9,732,910
- Issue date Aug 15, 2017
- Tokyo Electron Limited
- Koji Takayanagi
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Grant
Substrate cleaning apparatus, substrate cleaning method and non-tra...
- Patent number 9,704,730
- Issue date Jul 11, 2017
- Tokyo Electron Limited
- Atsushi Ookouchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Developing method, developing apparatus and storage medium
- Patent number 9,690,202
- Issue date Jun 27, 2017
- Tokyo Electron Limited
- Yuichi Terashita
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
LIQUID PROCESSING DEVICE AND LIQUID PROCESSING METHOD
- Publication number 20210008588
- Publication date Jan 14, 2021
- TOKYO ELECTRON LIMITED
- Hiroyuki Ide
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
PROCESSING LIQUID SUPPLYING APPARATUS AND PROCESSING LIQUID SUPPLYI...
- Publication number 20200227286
- Publication date Jul 16, 2020
- TOKYO ELECTRON LIMITED
- Yuichi Terashita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF ADJUSTING SUBSTRATE PR...
- Publication number 20200066559
- Publication date Feb 27, 2020
- TOKYO ELECTRON LIMITED
- Kenichi SHIGETOMI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
DEVELOPING TREATMENT METHOD, COMPUTER STORAGE MEDIUM AND DEVELOPING...
- Publication number 20200064742
- Publication date Feb 27, 2020
- TOKYO ELECTRON LIMITED
- Akiko KAI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SOLUTION TREATMENT APPARATUS AND CLEANING METHOD FOR SOLUTION TREAT...
- Publication number 20190255561
- Publication date Aug 22, 2019
- TOKYO ELECTRON LIMITED
- Satoshi SHIMMURA
- B08 - CLEANING
Information Patent Application
FILM FORMING METHOD, STORAGE MEDIUM, AND FILM FORMING SYSTEM
- Publication number 20180361428
- Publication date Dec 20, 2018
- TOKYO ELECTRON LIMITED
- Kentaro YOSHIHARA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
Coating Film Forming Method, Coating Film Forming Apparatus, and St...
- Publication number 20180350594
- Publication date Dec 6, 2018
- TOKYO ELECTRON LIMITED
- Kousuke YOSHIHARA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SOLUTION TREATMENT APPARATUS AND SOLUTION TREATMENT METHOD
- Publication number 20180093205
- Publication date Apr 5, 2018
- TOKYO ELECTRON LIMITED
- Kousuke YOSHIHARA
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
PROCESSING LIQUID SUPPLYING APPARATUS AND METHOD OF SUPPLYING PROCE...
- Publication number 20180074407
- Publication date Mar 15, 2018
- TOKYO ELECTRON LIMITED
- Kousuke YOSHIHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATING TREATMENT METHOD, COMPUTER STORAGE MEDIUM, AND COATING TREA...
- Publication number 20180021804
- Publication date Jan 25, 2018
- TOKYO ELECTRON LIMITED
- Takafumi HASHIMOTO
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SOLUTION TREATMENT APPARATUS AND SOLUTION TREATMENT METHOD
- Publication number 20170296944
- Publication date Oct 19, 2017
- TOKYO ELECTRON LIMITED
- Kousuke YOSHIHARA
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
SUBSTRATE CLEANING APPARATUS, SUBSTRATE CLEANING METHOD AND NON-TRA...
- Publication number 20170256427
- Publication date Sep 7, 2017
- TOKYO ELECTRON LIMITED
- Atsushi OOKOUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF ADJUSTING SUBSTRATE PR...
- Publication number 20170170040
- Publication date Jun 15, 2017
- TOKYO ELECTRON LIMITED
- Kenichi SHIGETOMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATING FILM FORMING METHOD, COATING FILM FORMING APPARATUS, AND ST...
- Publication number 20170140929
- Publication date May 18, 2017
- TOKYO ELECTRON LIMITED
- Kousuke YOSHIHARA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
DEVELOPING METHOD, DEVELOPING APPARATUS AND STORAGE MEDIUM
- Publication number 20170090291
- Publication date Mar 30, 2017
- TOKYO ELECTRON LIMITED
- Kousuke YOSHIHARA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
DEVELOPING APPARATUS, DEVELOPING METHOD AND STORAGE MEDIUM
- Publication number 20170045821
- Publication date Feb 16, 2017
- TOKYO ELECTRON LIMITED
- Kousuke YOSHIHARA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE TREATMENT SYSTEM
- Publication number 20170031245
- Publication date Feb 2, 2017
- TOKYO ELECTRON LIMITED
- Seiji NAGAHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXPOSURE APPARATUS, RESIST PATTERN FORMING METHOD, AND STORAGE MEDIUM
- Publication number 20160327869
- Publication date Nov 10, 2016
- TOKYO ELECTRON LIMITED
- Seiji NAGAHARA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COATING METHOD, COMPUTER STORAGE MEDIUM AND COATING APPARATUS
- Publication number 20160167079
- Publication date Jun 16, 2016
- TOKYO ELECTRON LIMITED
- Takafumi HASIMOTO
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
LIQUID TREATMENT APPARATUS AND METHOD AND NON-TRANSITORY STORAGE ME...
- Publication number 20160161867
- Publication date Jun 9, 2016
- TOKYO ELECTRON LIMITED
- Yuichi YOSHIDA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVELOPING METHOD, DEVELOPING APPARATUS AND STORAGE MEDIUM
- Publication number 20160070171
- Publication date Mar 10, 2016
- TOKYO ELECTRON LIMITED
- Yuichi TERASHITA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COATING TREATMENT METHOD WITH AIRFLOW CONTROL, AND NON-TRANSITORY R...
- Publication number 20150371853
- Publication date Dec 24, 2015
- TOKYO ELECTRON LIMITED
- Kousuke YOSHIHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING METHOD, COMPUTER STORAGE MEDIUM, AND FILM FORMING SYSTEM
- Publication number 20150357188
- Publication date Dec 10, 2015
- TOKYO ELECTRON LIMITED
- Satoru SHIMURA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
CHEMICAL SUPPLY SYSTEM, SUBSTRATE TREATMENT APPARATUS INCORPORATING...
- Publication number 20150279702
- Publication date Oct 1, 2015
- TOKYO ELECTRON LIMITED
- Toshinobu FURUSHO
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
FILTER DEVICE
- Publication number 20150151227
- Publication date Jun 4, 2015
- TOKYO ELECTRON LIMITED
- Koji TAKAYANAGI
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
PROCESSING LIQUID SUPPLYING APPARATUS AND METHOD OF SUPPLYING PROCE...
- Publication number 20150125793
- Publication date May 7, 2015
- TOKYO ELECTRON LIMITED
- Kousuke YOSHIHARA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROCESSING-LIQUID SUPPLY APPARATUS AND PROCESSING-LIQUID SUPPLY METHOD
- Publication number 20150090340
- Publication date Apr 2, 2015
- TOKYO ELECTRON LIMITED
- Koji Takayanagi
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Application
PROCESSING LIQUID SUPPLYING APPARATUS AND PROCESSING LIQUID SUPPLYI...
- Publication number 20150092167
- Publication date Apr 2, 2015
- TOKYO ELECTRON LIMITED
- Yuichi Terashita
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVELOPING APPARATUS, DEVELOPING METHOD AND STORAGE MEDIUM
- Publication number 20150036110
- Publication date Feb 5, 2015
- TOKYO ELECTRON LIMITED
- Kousuke YOSHIHARA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVELOPING METHOD, DEVELOPING APPARATUS AND STORAGE MEDIUM
- Publication number 20150036109
- Publication date Feb 5, 2015
- TOKYO ELECTRON LIMITED
- Kousuke YOSHIHARA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Kousuke YOSHIHARA

Person

Patents Grantslast 30 patents

Developing treatment method, computer storage medium and developing...

Substrate processing apparatus and method of adjusting substrate pr...

Liquid processing device and liquid processing method

Processing liquid supplying apparatus and processing liquid supplyi...

Solution treatment apparatus and cleaning method for solution treat...

Film forming method, storage medium, and film forming system

Liquid processing apparatus, liquid processing method, and storage...

Coating film forming method, coating film forming apparatus, and st...

Substrate processing apparatus and method of adjusting substrate pr...

Developing apparatus, developing method and storage medium

Processing liquid supplying apparatus and method of supplying proce...

Cover plate for wind mark control in spin coating process

Developing method, developing apparatus and storage medium

Exposure apparatus, resist pattern forming method, and storage medium

Processing liquid supplying apparatus and processing liquid supplyi...

Coating film forming method, coating film forming apparatus, and st...

Coating method, computer storage medium and coating apparatus

Chemical supply system, substrate treatment apparatus incorporating...

Solution treatment apparatus and solution treatment method

Substrate treatment system

Coating treatment method with airflow control, and non-transitory r...

Solution treatment apparatus and solution treatment method

Processing liquid supplying apparatus and method of supplying proce...

Liquid treatment apparatus and method and non-transitory storage me...

Substrate cleaning apparatus, substrate cleaning method and non-tra...

Film forming method, computer storage medium, and film forming system

Solution treatment apparatus and solution treatment method

Processing-liquid supply apparatus and processing-liquid supply method

Substrate cleaning apparatus, substrate cleaning method and non-tra...

Developing method, developing apparatus and storage medium

Patents Applicationslast 30 patents

LIQUID PROCESSING DEVICE AND LIQUID PROCESSING METHOD

PROCESSING LIQUID SUPPLYING APPARATUS AND PROCESSING LIQUID SUPPLYI...

SUBSTRATE PROCESSING APPARATUS AND METHOD OF ADJUSTING SUBSTRATE PR...

DEVELOPING TREATMENT METHOD, COMPUTER STORAGE MEDIUM AND DEVELOPING...

SOLUTION TREATMENT APPARATUS AND CLEANING METHOD FOR SOLUTION TREAT...

FILM FORMING METHOD, STORAGE MEDIUM, AND FILM FORMING SYSTEM

Coating Film Forming Method, Coating Film Forming Apparatus, and St...

SOLUTION TREATMENT APPARATUS AND SOLUTION TREATMENT METHOD

PROCESSING LIQUID SUPPLYING APPARATUS AND METHOD OF SUPPLYING PROCE...

COATING TREATMENT METHOD, COMPUTER STORAGE MEDIUM, AND COATING TREA...

SOLUTION TREATMENT APPARATUS AND SOLUTION TREATMENT METHOD

SUBSTRATE CLEANING APPARATUS, SUBSTRATE CLEANING METHOD AND NON-TRA...

SUBSTRATE PROCESSING APPARATUS AND METHOD OF ADJUSTING SUBSTRATE PR...

COATING FILM FORMING METHOD, COATING FILM FORMING APPARATUS, AND ST...

DEVELOPING METHOD, DEVELOPING APPARATUS AND STORAGE MEDIUM

DEVELOPING APPARATUS, DEVELOPING METHOD AND STORAGE MEDIUM

SUBSTRATE TREATMENT SYSTEM

EXPOSURE APPARATUS, RESIST PATTERN FORMING METHOD, AND STORAGE MEDIUM

COATING METHOD, COMPUTER STORAGE MEDIUM AND COATING APPARATUS

LIQUID TREATMENT APPARATUS AND METHOD AND NON-TRANSITORY STORAGE ME...

DEVELOPING METHOD, DEVELOPING APPARATUS AND STORAGE MEDIUM

COATING TREATMENT METHOD WITH AIRFLOW CONTROL, AND NON-TRANSITORY R...

FILM FORMING METHOD, COMPUTER STORAGE MEDIUM, AND FILM FORMING SYSTEM

CHEMICAL SUPPLY SYSTEM, SUBSTRATE TREATMENT APPARATUS INCORPORATING...

FILTER DEVICE

PROCESSING LIQUID SUPPLYING APPARATUS AND METHOD OF SUPPLYING PROCE...

PROCESSING-LIQUID SUPPLY APPARATUS AND PROCESSING-LIQUID SUPPLY METHOD

PROCESSING LIQUID SUPPLYING APPARATUS AND PROCESSING LIQUID SUPPLYI...

DEVELOPING APPARATUS, DEVELOPING METHOD AND STORAGE MEDIUM

DEVELOPING METHOD, DEVELOPING APPARATUS AND STORAGE MEDIUM