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Kouta Tsutsumi
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Fukuoka, JP
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Patents Grants
last 30 patents
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Patent Grant
Dielectric layer for electrostatic chuck and electrostatic chuck
Patent number
9,120,704
Issue date
Sep 1, 2015
Nippon Tungsten Co., Ltd.
Kouta Tsutsumi
C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information
Patent Grant
Composite ceramic body, and component member for semiconductor manu...
Patent number
9,079,800
Issue date
Jul 14, 2015
Nippon Tungsten Co., Ltd.
Kouta Tsutsumi
C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Patents Applications
last 30 patents
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Patent Application
DIELECTRIC LAYER FOR ELECTROSTATIC CHUCK AND ELECTROSTATIC CHUCK
Publication number
20140103612
Publication date
Apr 17, 2014
NIPPON TUNGSTEN CO., LTD.
Kouta Tsutsumi
C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information
Patent Application
COMPOSITE CERAMIC BODY, AND COMPONENT MEMBER FOR SEMICONDUCTOR MANU...
Publication number
20130299749
Publication date
Nov 14, 2013
NIPPON TUNGSTEN CO., LTD
Kouta TSUTSUMI
B82 - NANO-TECHNOLOGY