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Koutarou Miyatani
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Yamanashi, JP
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last 30 patents
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Patent Grant
Method for supercritical carbon dioxide processing of fluoro-carbon...
Patent number
7,307,019
Issue date
Dec 11, 2007
Tokyo Electron Limited
Kohei Kawamura
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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A METHOD FOR SUPERCRITICAL CARBON DIOXIDE PROCESSING OF FLUORO-CARB...
Publication number
20060068583
Publication date
Mar 30, 2006
TOKYO ELECTRON LIMITED
Kohei Kawamura
H01 - BASIC ELECTRIC ELEMENTS