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Kouzi Kitagawa
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Fukushima, JP
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Patents Grants
last 30 patents
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Patent Grant
Polishing head, polishing apparatus and polishing method for semico...
Patent number
7,740,521
Issue date
Jun 22, 2010
Shin-Etsu Handotai Co., Ltd.
Hiromasa Hashimoto
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
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Patent Application
Polishing Head, Polishing Apparatus and Polishing Method for Semico...
Publication number
20080254720
Publication date
Oct 16, 2008
Shin-Etsu Handotai Co., Ltd.
Hiromasa Hashimoto
B24 - GRINDING POLISHING