Kouzo Kai

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Tokyo-To, JP

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Patents Applicationslast 30 patents

Information Patent Application
PROCESSING APPARATUS USING SOURCE GAS AND REACTIVE GAS
- Publication number 20090211526
- Publication date Aug 27, 2009
- TOKYO ELECTRON LIMITED
- Masayuki TANAKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Processing Apparatus Using Source Gas and Reactive Gas
- Publication number 20070251452
- Publication date Nov 1, 2007
- Masayuki Tanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...