Kouzo Tsukada

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Yokohamashi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus for controlling resist stripping solution
- Patent number 5,896,874
- Issue date Apr 27, 1999
- Hirama Rika Kenkyujo Ltd.
- Toshimoto Nakagawa
- G05 - CONTROLLING REGULATING
Information Patent Grant
Apparatus for controlling resist stripping solution
- Patent number 5,671,760
- Issue date Sep 30, 1997
- Hirama RIKA Kenkyujo Ltd.
- Toshimoto Nakagawa
- B08 - CLEANING
Information Patent Grant
Apparatus for controlling developing solution
- Patent number 5,223,881
- Issue date Jun 29, 1993
- Hirama Rika Kenkyujio Ltd.
- Toshimoto Nakagawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY