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Kouzou Kawahara
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Kumamoto, JP
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Patents Grants
last 30 patents
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Patent Grant
Substrate processing apparatus with electronic heater powered by po...
Patent number
11,862,489
Issue date
Jan 2, 2024
Tokyo Electron Limited
Satoshi Morita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus
Patent number
11,510,284
Issue date
Nov 22, 2022
Tokyo Electron Limited
Satoshi Morita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Liquid coating method, liquid coating apparatus, and computer-reada...
Patent number
10,201,826
Issue date
Feb 12, 2019
Tokyo Electron Limited
Katsunori Ichino
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Patents Applications
last 30 patents
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Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20210118706
Publication date
Apr 22, 2021
TOKYO ELECTRON LIMITED
Satoshi MORITA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20200107404
Publication date
Apr 2, 2020
TOKYO ELECTRON LIMITED
Satoshi Morita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LIQUID COATING METHOD, LIQUID COATING APPARATUS, AND COMPUTER-READA...
Publication number
20150352587
Publication date
Dec 10, 2015
TOKYO ELECTRON LIMITED
Katsunori Ichino
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...