Kouzou TACHIBANA

Person

Koshi City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method
- Patent number 11,600,500
- Issue date Mar 7, 2023
- Tokyo Electron Limited
- Kouzou Tachibana
- B08 - CLEANING
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,217,451
- Issue date Jan 4, 2022
- Tokyo Electron Limited
- Hitoshi Kosugi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid processing method, substrate processing apparatus, and stora...
- Patent number 10,867,814
- Issue date Dec 15, 2020
- Tokyo Electron Limited
- Yosuke Kawabuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 10,770,284
- Issue date Sep 8, 2020
- Tokyo Electron Limited
- Hiroki Yonekawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate cleaning method, substrate cleaning system and memory medium
- Patent number 10,734,255
- Issue date Aug 4, 2020
- Tokyo Electron Limited
- Kenji Sekiguchi
- B08 - CLEANING
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 9,865,452
- Issue date Jan 9, 2018
- Tokyo Electron Limited
- Kotaro Oishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating film forming apparatus having ring-shaped baffle member mov...
- Patent number 9,687,873
- Issue date Jun 27, 2017
- Tokyo Electron Limited
- Kouzou Tachibana
- F26 - DRYING
Information Patent Grant
Liquid processing apparatus, liquid processing method and storage m...
- Patent number 9,217,922
- Issue date Dec 22, 2015
- Tokyo Electron Limited
- Minoru Kubota
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Coating film forming apparatus, coating film forming method, and st...
- Patent number 9,070,731
- Issue date Jun 30, 2015
- Tokyo Electron Limited
- Kouzou Tachibana
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Coating treatment apparatus, coating treatment method, and non-tran...
- Patent number 8,871,301
- Issue date Oct 28, 2014
- Tokyo Electron Limited
- Kouzou Tachibana
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20250087476
- Publication date Mar 13, 2025
- TOKYO ELECTRON LIMITED
- Kouzou Tachibana
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20220130691
- Publication date Apr 28, 2022
- TOKYO ELECTRON LIMITED
- Kouzou TACHIBANA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20220059357
- Publication date Feb 24, 2022
- TOKYO ELECTRON LIMITED
- Hitoshi KOSUGI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20220020611
- Publication date Jan 20, 2022
- TOKYO ELECTRON LIMITED
- Kouzou Tachibana
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20200234998
- Publication date Jul 23, 2020
- TOKYO ELECTRON LIMITED
- Hitoshi KOSUGI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20180182616
- Publication date Jun 28, 2018
- TOKYO ELECTRON LIMITED
- Hiroki Yonekawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CLEANING METHOD, SUBSTRATE CLEANING SYSTEM AND MEMORY MEDIUM
- Publication number 20170345685
- Publication date Nov 30, 2017
- TOKYO ELECTRON LIMITED
- Kenji SEKIGUCHI
- B08 - CLEANING
Information Patent Application
LIQUID PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND STORA...
- Publication number 20170236729
- Publication date Aug 17, 2017
- TOKYO ELECTRON LIMITED
- Yosuke Kawabuchi
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20160300710
- Publication date Oct 13, 2016
- TOKYO ELECTRON LIMITED
- Kotaro Oishi
- B08 - CLEANING
Information Patent Application
Coating Film Forming Apparatus, Coating Film Forming Method, and St...
- Publication number 20150251211
- Publication date Sep 10, 2015
- TOKYO ELECTRON LIMITED
- Kouzou TACHIBANA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
COATING FILM FORMING APPARATUS, COATING FILM FORMING METHOD, AND ST...
- Publication number 20150155197
- Publication date Jun 4, 2015
- TOKYO ELECTRON LIMITED
- Kouzou TACHIBANA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD AND STORAGE M...
- Publication number 20140030423
- Publication date Jan 30, 2014
- TOKYO ELECTRON LIMITED
- Minoru KUBOTA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
COATING TREATMENT APPARATUS, COATING TREATMENT METHOD, AND NON-TRAN...
- Publication number 20120189773
- Publication date Jul 26, 2012
- TOKYO ELECTRON LIMITED
- Kouzou TACHIBANA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Kouzou TACHIBANA

Person

Patents Grantslast 30 patents

Substrate processing method

Substrate processing method and substrate processing apparatus

Liquid processing method, substrate processing apparatus, and stora...

Substrate processing method and substrate processing apparatus

Substrate cleaning method, substrate cleaning system and memory medium

Substrate processing method and substrate processing apparatus

Coating film forming apparatus having ring-shaped baffle member mov...

Liquid processing apparatus, liquid processing method and storage m...

Coating film forming apparatus, coating film forming method, and st...

Coating treatment apparatus, coating treatment method, and non-tran...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE CLEANING METHOD, SUBSTRATE CLEANING SYSTEM AND MEMORY MEDIUM

LIQUID PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND STORA...

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

Coating Film Forming Apparatus, Coating Film Forming Method, and St...

COATING FILM FORMING APPARATUS, COATING FILM FORMING METHOD, AND ST...

LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD AND STORAGE M...

COATING TREATMENT APPARATUS, COATING TREATMENT METHOD, AND NON-TRAN...