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Patent Grant
Optical type inspection apparatus, inspection system and the wafer...
Patent number
9,097,686
Issue date
Aug 4, 2015
Hitachi High-Technologies Corporation
Yoshio Bamba
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
OPTICAL TYPE INSPECTION APPARATUS, INSPECTION SYSTEM AND THE WAFER...
Publication number
20140192352
Publication date
Jul 10, 2014
Hitachi High-Technologies Corporation
Yoshio Bamba
G01 - MEASURING TESTING