Koyo Morita

Person

Tachikawa, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Manufacturing method of semiconductor integrated circuit device
- Patent number 6,740,171
- Issue date May 25, 2004
- Renesas Technology Corp.
- Yutaka Shimada
- B08 - CLEANING
Information Patent Grant
Laser machining apparatus and method of the same
- Patent number 5,229,569
- Issue date Jul 20, 1993
- Hitachi, Ltd.
- Tateoki Miyauchi
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method of cutting interconnection pattern with laser and apparatus...
- Patent number 5,208,437
- Issue date May 4, 1993
- Hitachi, Ltd.
- Tateoki Miyauchi
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Projection aligner method utilizing monitoring of light quantity
- Patent number 4,780,606
- Issue date Oct 25, 1988
- Hitachi, Ltd.
- Koyo Morita
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection aligner with a sensor for monitoring light quantity
- Patent number 4,701,608
- Issue date Oct 20, 1987
- Hitachi, Ltd.
- Koyo Morita
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection aligner
- Patent number 4,598,197
- Issue date Jul 1, 1986
- Hitachi, Ltd.
- Koyo Morita
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection aligner and method of positioning a wafer
- Patent number 4,298,273
- Issue date Nov 3, 1981
- Hitachi, Ltd.
- Hiroshi Nishizuka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of and apparatus for aligning photomask
- Patent number 4,218,136
- Issue date Aug 19, 1980
- Hitachi, Ltd.
- Susumu Komoriya
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Manufacturing method of semiconductor integrated circuit device
- Publication number 20030041878
- Publication date Mar 6, 2003
- Hitachi, Ltd.
- Yutaka Shimada
- H01 - BASIC ELECTRIC ELEMENTS

Koyo Morita

Person

Patents Grantslast 30 patents

Manufacturing method of semiconductor integrated circuit device

Laser machining apparatus and method of the same

Method of cutting interconnection pattern with laser and apparatus...

Projection aligner method utilizing monitoring of light quantity

Projection aligner with a sensor for monitoring light quantity

Projection aligner

Projection aligner and method of positioning a wafer

Method of and apparatus for aligning photomask

Patents Applicationslast 30 patents

Manufacturing method of semiconductor integrated circuit device