Koyu HASEGAWA

Person

Oshu-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Transfer device, substrate processing apparatus, and transfer method
- Patent number 10,978,322
- Issue date Apr 13, 2021
- Tokyo Electron Limited
- Ao Zheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Connection structure, magnetic annealing device using same, and con...
- Patent number 10,473,399
- Issue date Nov 12, 2019
- Tokyo Electron Limited
- Ian Colgan
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Substrate transfer system and heat treatment apparatus using same
- Patent number 9,939,200
- Issue date Apr 10, 2018
- Tokyo Electron Limited
- Koyu Hasegawa
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Heat treatment system and a method for cooling a loading chamber
- Patent number 7,059,849
- Issue date Jun 13, 2006
- Tokyo Electron Limited
- Kazunari Sakata
- F27 - FURNACES KILNS OVENS RETORTS

Patents Applicationslast 30 patents

Information Patent Application
TRANSFER DEVICE, SUBSTRATE PROCESSING APPARATUS, AND TRANSFER METHOD
- Publication number 20190067055
- Publication date Feb 28, 2019
- TOKYO ELECTRON LIMITED
- Ao Zheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONNECTION STRUCTURE, MAGNETIC ANNEALING DEVICE USING SAME, AND CON...
- Publication number 20160216032
- Publication date Jul 28, 2016
- TOKYO ELECTRON LIMITED
- Ian Colgan
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Substrate Transfer System and Heat Treatment Apparatus Using Same
- Publication number 20160146539
- Publication date May 26, 2016
- TOKYO ELECTRON LIMITED
- Koyu HASEGAWA
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Application
HIGHLY CLEAN AND HOT VALVE
- Publication number 20120001102
- Publication date Jan 5, 2012
- TOKYO ELECTRON LIMITED
- Yasuhiro Chiba
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
DEPOSITION SOURCE UNIT, DEPOSITION APPARATUS AND TEMPERATURE CONTRO...
- Publication number 20100126417
- Publication date May 27, 2010
- TOKYO ELECTRON LIMITED
- Koyu Hasegawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EVAPORATING APPARATUS
- Publication number 20100071623
- Publication date Mar 25, 2010
- TOKYO ELECTRON LIMITED
- Shingo Watanabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION APPARATUS FOR ORGANIC EL AND EVAPORATING APPARATUS
- Publication number 20100000469
- Publication date Jan 7, 2010
- TOKYO ELECTRON LIMITED
- Yasushi Yagi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Heat treatment system and method therefore
- Publication number 20070166657
- Publication date Jul 19, 2007
- Kazunari Sakata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Vertical heat treatment system, method for controlling vertical hea...
- Publication number 20020023458
- Publication date Feb 28, 2002
- Kazunari Sakata
- H01 - BASIC ELECTRIC ELEMENTS

Koyu HASEGAWA

Person

Patents Grantslast 30 patents

Transfer device, substrate processing apparatus, and transfer method

Connection structure, magnetic annealing device using same, and con...

Substrate transfer system and heat treatment apparatus using same

Heat treatment system and a method for cooling a loading chamber

Patents Applicationslast 30 patents

TRANSFER DEVICE, SUBSTRATE PROCESSING APPARATUS, AND TRANSFER METHOD

CONNECTION STRUCTURE, MAGNETIC ANNEALING DEVICE USING SAME, AND CON...

Substrate Transfer System and Heat Treatment Apparatus Using Same

HIGHLY CLEAN AND HOT VALVE

DEPOSITION SOURCE UNIT, DEPOSITION APPARATUS AND TEMPERATURE CONTRO...

EVAPORATING APPARATUS

DEPOSITION APPARATUS FOR ORGANIC EL AND EVAPORATING APPARATUS

Heat treatment system and method therefore

Vertical heat treatment system, method for controlling vertical hea...