Kozo Hara

Person

  • Yamanashi, JP

Patents Grantslast 30 patents

  • Information Patent Grant

    Substrate processing apparatus

    • Patent number 6,264,748
    • Issue date Jul 24, 2001
    • Tokyo Electron Limited
    • Yasuyuki Kuriki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Support device

    • Patent number 4,944,542
    • Issue date Jul 31, 1990
    • Tel Yamanashi Limited
    • Mizuki Uchida
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Wafer accounting and processing system

    • Patent number 4,859,993
    • Issue date Aug 22, 1989
    • Tokyo Electron Limited
    • Toshihiko Kagami
    • H01 - BASIC ELECTRIC ELEMENTS