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Kozo Kai
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Fuchu City, JP
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last 30 patents
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Patent Grant
Substrate processing system and substrate position correction method
Patent number
9,318,363
Issue date
Apr 19, 2016
Tokyo Electron Limited
Kozo Kai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of lowering temperature of substrate table, computer-readabl...
Patent number
9,070,728
Issue date
Jun 30, 2015
Tokyo Electron Limited
Kenichi Kobayashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Heat treating apparatus
Patent number
5,088,697
Issue date
Feb 18, 1992
Tokyo Electron Limited
Seishi Murakami
C30 - CRYSTAL GROWTH
Patents Applications
last 30 patents
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Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE POSITION CORRECTION METHOD
Publication number
20150005928
Publication date
Jan 1, 2015
Kozo Kai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF LOWERING TEMPERATURE OF SUBSTRATE TABLE, COMPUTER-READABL...
Publication number
20110114298
Publication date
May 19, 2011
TOKYO ELECTRON LIMITED
Kenichi KOBAYASHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...