Kozo Mochiji

Person

Tokorozawa, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Surface analyzing method and its apparatus
- Patent number 5,714,757
- Issue date Feb 3, 1998
- Hitachi, Ltd.
- Naoshi Itabashi
- G01 - MEASURING TESTING
Information Patent Grant
Surface treating method and apparatus therefor
- Patent number 5,527,731
- Issue date Jun 18, 1996
- Hitachi, Ltd.
- Seiji Yamamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Optical element and projection exposure apparatus employing the same
- Patent number 5,485,497
- Issue date Jan 16, 1996
- Hitachi, Ltd.
- Hiroaki Oizumi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
X-ray exposure method with an X-ray mask comprising phase shifter s...
- Patent number 5,372,916
- Issue date Dec 13, 1994
- Hitachi, Ltd.
- Taro Ogawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection type X-ray lithography apparatus
- Patent number 5,305,364
- Issue date Apr 19, 1994
- Hitachi, Ltd.
- Kozo Mochiji
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
X-ray mask and method for producing same
- Patent number 5,177,773
- Issue date Jan 5, 1993
- Hitachi, Ltd.
- Hiroaki Oizumi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for production of graft copolymer, pattern replication metho...
- Patent number 5,017,458
- Issue date May 21, 1991
- Hitachi, Ltd.
- Yasunari Soda
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Grant
Pattern fabricating method
- Patent number 4,981,771
- Issue date Jan 1, 1991
- Hitachi, Ltd.
- Kozo Mochiji
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for forming pattern by using graft copolymerization
- Patent number 4,960,676
- Issue date Oct 2, 1990
- Hitachi, Ltd.
- Kozo Mochiji
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pattern fabrication by radiation-induced graft copolymerization
- Patent number 4,954,424
- Issue date Sep 4, 1990
- Hitachi, Ltd.
- Kozo Mochiji
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
X-ray exposure system
- Patent number 4,788,698
- Issue date Nov 29, 1988
- Hitachi, Ltd.
- Takeshi Kimura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mask for X-ray lithography and process for producing the same
- Patent number 4,719,161
- Issue date Jan 12, 1988
- Hitachi, Ltd.
- Takeshi Kimura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Linearly polarized X-ray patterning process
- Patent number 4,701,940
- Issue date Oct 20, 1987
- Hitachi, Ltd.
- Yasunari Soda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of measuring resist pattern
- Patent number 4,670,650
- Issue date Jun 2, 1987
- Hitachi, Ltd.
- Toshiharu Matsuzawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
X-ray mask with Ni pattern
- Patent number 4,599,737
- Issue date Jul 8, 1986
- Hitachi, Ltd.
- Takeshi Kimura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
X-Ray lithographic system
- Patent number 4,514,857
- Issue date Apr 30, 1985
- Hitachi, Ltd.
- Takashi Kimura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of forming patterns
- Patent number 4,403,151
- Issue date Sep 6, 1983
- Hitachi, Ltd.
- Kozo Mochiji
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of producing a semiconductor device
- Patent number 4,315,984
- Issue date Feb 16, 1982
- Hitachi, Ltd.
- Shinji Okazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming a pattern
- Patent number 4,307,176
- Issue date Dec 22, 1981
- Hitachi, Ltd.
- Kozo Mochiji
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Kozo Mochiji

Person

Patents Grantslast 30 patents

Surface analyzing method and its apparatus

Surface treating method and apparatus therefor

Optical element and projection exposure apparatus employing the same

X-ray exposure method with an X-ray mask comprising phase shifter s...

Projection type X-ray lithography apparatus

X-ray mask and method for producing same

Method for production of graft copolymer, pattern replication metho...

Pattern fabricating method

Method for forming pattern by using graft copolymerization

Pattern fabrication by radiation-induced graft copolymerization

X-ray exposure system

Mask for X-ray lithography and process for producing the same

Linearly polarized X-ray patterning process

Method of measuring resist pattern

X-ray mask with Ni pattern

X-Ray lithographic system

Method of forming patterns

Method of producing a semiconductor device

Method of forming a pattern