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Pattern inspection method
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Patent number 4,776,023
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Issue date Oct 4, 1988
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Hitachi, Ltd.
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Toshimitsu Hamada
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G06 - COMPUTING CALCULATING COUNTING
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Pattern checking apparatus
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Patent number 4,628,531
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Issue date Dec 9, 1986
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Hitachi, Ltd.
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Keiichi Okamoto
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G06 - COMPUTING CALCULATING COUNTING
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Bit pattern generator
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Patent number 4,528,634
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Issue date Jul 9, 1985
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Hitachi, Ltd.
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Kozo Nakahata
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G06 - COMPUTING CALCULATING COUNTING
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