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Kranthimitra Adusumilli
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Austin, TX, US
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Patents Grants
last 30 patents
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Patent Grant
System and method for improvement of alignment and overlay for micr...
Patent number
7,535,549
Issue date
May 19, 2009
Board of Regents, University of Texas System
Anshuman Cherala
B82 - NANO-TECHNOLOGY
Patents Applications
last 30 patents
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Patent Application
System and method for improvement of alignment and overlay for micr...
Publication number
20050271955
Publication date
Dec 8, 2005
Board of Regents, The University of Texas System
Anshuman Cherala
B82 - NANO-TECHNOLOGY