Krishanu SHOME

Person

Cheshire, CT, US

People

Patents Grantslast 30 patents

Information Patent Grant
Wafer alignment using form birefringence of targets or product
- Patent number 11,971,665
- Issue date Apr 30, 2024
- ASML Holding N.V.
- Joshua Adams
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for and method of sensing alignment marks
- Patent number 11,899,380
- Issue date Feb 13, 2024
- ASML Holding N.V.
- Krishanu Shome
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus for and method of sensing alignment marks
- Patent number 11,841,628
- Issue date Dec 12, 2023
- ASML Holding N.V.
- Krishanu Shome
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, metrology system, and illumination systems...
- Patent number 11,789,368
- Issue date Oct 17, 2023
- ASML Holding N.V.
- Yuxiang Lin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Variable diffraction grating
- Patent number 11,703,771
- Issue date Jul 18, 2023
- ASML Holding N.V.
- Ali Alsaqqa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Compact alignment sensor arrangements
- Patent number 11,531,280
- Issue date Dec 20, 2022
- ASML Holding N.V.
- Tamer Mohamed Tawfik Ahmed Mohamed Elazhary
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Adaptive alignment
- Patent number 11,513,446
- Issue date Nov 29, 2022
- ASML Holding N.V.
- Greger Göte Andersson
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Noise correction for alignment signal
- Patent number 11,493,852
- Issue date Nov 8, 2022
- ASML Holdings N.V.
- Zahrasadat Dastouri
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Scan signal characterization diagnostics
- Patent number 11,347,152
- Issue date May 31, 2022
- ASML Netherlands B.V.
- Cornelis Melchior Brouwer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment sensor apparatus for process sensitivity compensation
- Patent number 11,175,593
- Issue date Nov 16, 2021
- ASML Netherlands B.V.
- Simon Reinald Huisman
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method, substrate and apparatus to measure performance of optical m...
- Patent number 11,016,396
- Issue date May 25, 2021
- ASML Holding N.V.
- Leonardo Gabriel Montilla
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical system of an alignment system
- Patent number 10,732,524
- Issue date Aug 4, 2020
- ASML Holding N.V.
- Krishanu Shome
- G02 - OPTICS
Information Patent Grant
Polarization independent metrology system
- Patent number 10,558,131
- Issue date Feb 11, 2020
- ASML Holding N.V.
- Krishanu Shome
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment system wafer stack beam analyzer
- Patent number 10,488,767
- Issue date Nov 26, 2019
- ASML Holding N.V.
- Krishanu Shome
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Polarization independent metrology system
- Patent number 10,338,481
- Issue date Jul 2, 2019
- ASML Holding N.V.
- Krishanu Shome
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
CONTROLLING ABERRATION IN AN OPTICAL SYSTEM, A METROLOGY SYSTEM, LI...
- Publication number 20240201486
- Publication date Jun 20, 2024
- ASML NETHERLANDS B.V.
- Krishanu SHOME
- G02 - OPTICS
Information Patent Application
APPARATUS FOR AND METHOD OF SENSING ALIGNMENT MARKS
- Publication number 20230116318
- Publication date Apr 13, 2023
- ASML Holding N.V.
- Krishanu SHOME
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
VARIABLE DIFFRACTION GRATING
- Publication number 20220390861
- Publication date Dec 8, 2022
- ASML Holding N.V.
- Ali ALSAQQA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS, METROLOGY SYSTEM, AND ILLUMINATION SYSTEMS...
- Publication number 20220373895
- Publication date Nov 24, 2022
- ASML Holding N.V.
- Yuxiang LIN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS FOR AND METHOD OF SENSING ALIGNMENT MARKS
- Publication number 20220291598
- Publication date Sep 15, 2022
- ASML Holding N.V.
- Krishanu SHOME
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
WAFER ALIGNMENT USING FORM BIREFRINGENCE OF TARGETS OR PRODUCT
- Publication number 20220137523
- Publication date May 5, 2022
- ASML Holding N.V.
- Joshua ADAMS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
NOISE CORRECTION FOR ALIGNMENT SIGNAL
- Publication number 20220066334
- Publication date Mar 3, 2022
- Zahrasadat DASTOURI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ADAPTIVE ALIGNMENT
- Publication number 20210397103
- Publication date Dec 23, 2021
- ASML Holding N.V.
- Greger Göte Andersson
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COMPACT ALIGNMENT SENSOR ARRANGEMENTS
- Publication number 20210318627
- Publication date Oct 14, 2021
- ASML Holding N.V.
- Tamer Mohamed Tawfik Ahmed Mohamed ELAZHARY
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Alignment Sensor Apparatus for Process Sensivity Compensation
- Publication number 20210132509
- Publication date May 6, 2021
- ASML NETHERLANDS B.V.
- Simon Reinald HUISMAN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Scan Signal Characterization Diagnostics
- Publication number 20200401053
- Publication date Dec 24, 2020
- ASML NETHERLANDS B.V.
- Cornelis Melchior BROUWER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method, Substrate and Apparatus to Measure Performance of Optical M...
- Publication number 20200073255
- Publication date Mar 5, 2020
- ASML Holding N.V.
- Leonardo Gabriel MONTILLA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Alignment System Wafer Stack Beam Analyzer
- Publication number 20190204759
- Publication date Jul 4, 2019
- ASML Holding N.V.
- Krishanu SHOME
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
POLARIZATION INDEPENDENT METROLOGY SYSTEM
- Publication number 20180299790
- Publication date Oct 18, 2018
- ASML Holding N.V.
- Krishanu SHOME
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Optical System of an Alignment System
- Publication number 20180224759
- Publication date Aug 9, 2018
- ASML Holding N.V.
- Krishanu SHOME
- G02 - OPTICS

Krishanu SHOME

Person

Patents Grantslast 30 patents

Wafer alignment using form birefringence of targets or product

Apparatus for and method of sensing alignment marks

Apparatus for and method of sensing alignment marks

Lithographic apparatus, metrology system, and illumination systems...

Variable diffraction grating

Compact alignment sensor arrangements

Adaptive alignment

Noise correction for alignment signal

Scan signal characterization diagnostics

Alignment sensor apparatus for process sensitivity compensation

Method, substrate and apparatus to measure performance of optical m...

Optical system of an alignment system

Polarization independent metrology system

Alignment system wafer stack beam analyzer

Polarization independent metrology system

Patents Applicationslast 30 patents

CONTROLLING ABERRATION IN AN OPTICAL SYSTEM, A METROLOGY SYSTEM, LI...

APPARATUS FOR AND METHOD OF SENSING ALIGNMENT MARKS

VARIABLE DIFFRACTION GRATING

LITHOGRAPHIC APPARATUS, METROLOGY SYSTEM, AND ILLUMINATION SYSTEMS...

APPARATUS FOR AND METHOD OF SENSING ALIGNMENT MARKS

WAFER ALIGNMENT USING FORM BIREFRINGENCE OF TARGETS OR PRODUCT

NOISE CORRECTION FOR ALIGNMENT SIGNAL

ADAPTIVE ALIGNMENT

COMPACT ALIGNMENT SENSOR ARRANGEMENTS

Alignment Sensor Apparatus for Process Sensivity Compensation

Scan Signal Characterization Diagnostics

Method, Substrate and Apparatus to Measure Performance of Optical M...

Alignment System Wafer Stack Beam Analyzer

POLARIZATION INDEPENDENT METROLOGY SYSTEM

Optical System of an Alignment System